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News Release
April 3, 2009

ZYGO'S UniFire™ 7900 Selected for High Volume Manufacturing Lithography Process Control
MIDDLEFIELD, CT, Apr 03, 2009 (MARKET WIRE via COMTEX) -- Zygo Corporation (NASDAQ: ZIGO) today announced that it has received a follow-on order from a leading North American semiconductor manufacturer to use ZYGO's UniFire™ 7900 metrology system for high volume manufacturing process control. The system, which is expected to be part of a multi-million dollar commitment, will be used for measuring critical dimensions (CD) and overlay/registration at the 32nm node. Delivery is scheduled to occur in the second quarter of this calendar year.

The UniFire 7900 optical metrology system provides high precision, three-dimensional topography information to control high volume manufacturing processes. The UniFire 7900 is used for surface topography, critical dimensions, overlay/registration, and film thickness process control all within a small footprint.

Michael Darwin, ZYGO's Vice President, Semiconductor Solutions Business Unit, stated, "The selection outcome establishes the UniFire 7900 platform as a leader in lithography process control for thick films in the back end of the line. As structures become more complex, our 3D approach enables customers to tailor their metrology to the area of interest in their specific designs. As businesses strive to be more competitive, ZYGO provides the metrology to keep their lithography in control, thereby maintaining high yields to increase profitability. We deliver flexibility for our customers' development and robust capability for their 24 x 7 manufacturing at the 32nm node and beyond."

Zygo Corporation is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets.

All statements other than statements of historical fact included in this news release regarding financial performance, condition and operations, and the business strategy, plans, anticipated sales, orders, market acceptance, growth rates, market opportunities, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers; fluctuations in net sales to our major customer; manufacturing and supplier risks; risks of order cancellations or pushouts; dependence on timing and market acceptance of new product development; rapid technological and market change; risks in international operations; dependence on proprietary technology and key personnel; length of the sales cycle; environmental regulations; investment portfolio returns; fluctuations in our stock price; the risk that anticipated growth opportunities may be smaller than anticipated or may not be realized; Zygo Corporation undertakes no obligation to publicly update or revise forward-looking statements to reflect events or circumstances after the date of this news release. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K for the fiscal year ended June 30, 2008, as amended by our Form 10-K/A filed with the Securities and Exchange Commission on October 27, 2008.

For Further Information Call:
Walter A. Shephard
Vice President Finance, CFO, and Treasurer
Voice: 860-704-3955
Email Contact

SOURCE: Zygo Corporation
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