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News Release
February 5, 2017

Zygo Corporation Introduces Miniature Optical Position Sensor
for High-Precision Motion Sensing and Positioning Applications

Absolute Postion Sensor, ZYGO ZPS system
This small optical sensor is part of the ZPS absolute position measurement system.
MIDDLEFIELD, CT - Zygo Corporation is pleased to announce the introduction of the new ZPS™ absolute position measurement system with ultra-compact optical sensor technology. The ZPS system enables high-precision measurement and positional control for advanced applications, such as deformable optics, lens positioning systems, and fine stage control.

The ZPS system provides high-precision, non-contact absolute position measurements on up to 64 synchronized channels. Key features include a new ultra-compact optical sensor and hardware platform that delivers superior sensitivity, resolution and stability over a range of 1.2 mm. The advanced optical sensor generates virtually no heat and is insensitive to electromagnetic interference, achieving measurement resolution of 0.01 nm with better than 1 nm/day measurement stability. In addition, the ZPS system utilizes fiber optic cabling that allows for the use of a remote sensor location without impacting the measurement data. Optional accessories enable real-time automatic compensation for changes in ambient environmental conditions.

"The ZPS system represents the next evolution of sensors for short-range position metrology by combining simplified integration, expandability, reliability and performance into a single system," remarks Ernesto Abruna, Product Manager for Precision Positioning Systems at ZYGO.

"With these unique capabilities, the ZPS system is a great fit for many nano-positioning applications in which closed-loop control across multiple axes of motion is desired, especially in deformable optical components and complex optical systems."

Zygo Corporation, a unit of AMETEK Ultra Precision Technologies Division, is a leading provider of optical metrology solutions, high-precision optics, and optical assemblies used in a wide range of scientific, industrial, and medical applications.

AMETEK, Inc. is a leading global manufacturer of electronic instruments and electromechanical devices with annual sales of $4.0 billion. For more information, contact ZYGO, 21 Laurel Brook Rd., Middlefield, CT 06455-1291 USA. Telephone: +1-860-347-8506. E-mail:


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