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Patent Information for ZYGO Products

On this web page, Zygo Corporation provides United States Patent information about its products in three categories, in accordance with 35 USC § 287(a).

The patent information displayed on this page is believed to be accurate, but may not be exhaustive. The omission of a particular patent from a product category on this page does not mean that a product in that category is not covered by a patent, nor does the absence of a ZYGO product name or category on this page mean that a product is not covered by a patent. Additionally, while ZYGO makes a best effort to keep the information on this page up to date, it is possible that some patents listed on this page may have expired since the page was last updated.

The United States patents associated with each ZYGO product category are listed below.


Optical
Profilers

5,784,164
6,597,460
6,775,006
6,822,745
6,989,905
7,061,623
7,068,376
7,142,311
7,177,029
7,298,494
7,321,431
7,324,210
7,428,057
7,446,882
7,456,975
7,468,799
7,522,288
7,586,620
7,616,323
7,889,355
7,933,025
7,948,637
7,952,724
8,045,175
8,107,085
8,698,891
8,780,334
9,025,162


Laser
Interferometers

6,359,692
6,643,024
6,781,700
6,804,011
6,879,402
6,882,432
6,924,898
6,972,849
6,995,848
7,218,403
7,612,893
7,710,580
7,796,273
7,796,275
7,948,638
7,948,639
8,045,175
9,103,649

Stage
Positioning
Metrology

5,767,972
5,917,844
5,970,077
6,157,660
6,452,682
6,597,459
6,950,192
6,975,406
7,428,685
7,542,147
7,576,868
7,636,166
7,639,367
7,697,195
7,826,064
8,300,233
8,670,127
8,885,172
8,913,226
9,115,975
9,146,093

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What's New at ZYGO?

Visit ZYGO at these
Upcoming Events:
Photonics West 01/30 - 02/01
MD&M West 02/06 - 02/08
Advanced Litho. 02/27 - 02/28
Defense+Sensing 04/17 - 04/19
STLE Ann. Mtg. 05/20 - 05/24
(Click for a complete list)

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