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Please Note: Zygo Corporation is conducting business as usual; however most offices are closed to non-employees and are operating with reduced on-premises staffing in compliance with COVID-19 social distancing practices. Please contact us with any questions, and prior to shipping materials to any of our locations.

Patent Information for ZYGO Products

On this web page, Zygo Corporation provides United States Patent information about its products in three categories, in accordance with 35 USC § 287(a).

The patent information displayed on this page is believed to be accurate, but may not be exhaustive. The omission of a particular patent from a product category on this page does not mean that a product in that category is not covered by a patent, nor does the absence of a ZYGO product name or category on this page mean that a product is not covered by a patent. Additionally, while ZYGO makes a best effort to keep the information on this page up to date, it is possible that some patents listed on this page may have expired since the page was last updated.

The United States patents associated with each ZYGO product category are listed below.


Optical
Profilers

5,784,164
6,597,460
6,775,006
6,822,745
6,989,905
7,061,623
7,068,376
7,142,311
7,177,029
7,298,494
7,321,431
7,324,210
7,428,057
7,446,882
7,456,975
7,468,799
7,522,288
7,586,620
7,616,323
7,889,355
7,933,025
7,948,637
7,952,724
8,045,175
8,107,085
8,698,891
8,780,334
9,025,162
9,599,534
9,658,129
9,798,130


Laser
Interferometers

6,359,692
6,643,024
6,781,700
6,804,011
6,879,402
6,882,432
6,924,898
6,972,849
6,995,848
7,218,403
7,612,893
7,710,580
7,796,273
7,796,275
7,948,638
7,948,639
8,045,175
9,103,649

Stage
Position
Metrology

5,767,972
5,917,844
5,970,077
6,157,660
6,452,682
6,597,459
6,950,192
6,975,406
7,428,685
7,542,147
7,576,868
7,636,166
7,639,367
7,697,195
7,826,064
8,300,233
8,670,127
8,885,172
8,913,226
9,115,975
9,146,093
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