Full Metrology of Thin Films

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Blog Post
October 25, 2017

Optical Metrology for Precision Engineers
A Full-Day Short Course to be Presented at the 32nd Annual Meeting of ASPE

Optical Metrology for Precision Engineers
ZYGO's Dr. Peter de Groot will present a full-day short course entitled "Optical Metrology for Precision Engineers" at the 32nd Annual Meeting of ASPE in Charlotte, NC on Monday, October, 30, 2017. This popular course is suitable for both those new to the field and those interested in a solid review of optical metrology concepts and instrumentation from a fresh perspective.

Part 1 - 8:00 AM - 12:00 Noon

This is the first half of a full day, two-part tutorial in the principles of optical dimensional measurements for precision engineering applications. The tutorial begins with the principles of optics, from the nature of light to the properties of lenses, mirrors and optical systems. We will advance to raytracing, matrix methods, and definitions required for basic fluency in optical instrument specification and design. This leads naturally to a survey of the most common optical metrology tools based on geometrical optics, including telescopes, autocollimators, optical comparators, alignment scopes, microscopes, machine vision cameras, and systems based on triangulation and moiré methods.

Part 2 – 1:30 PM - 5:30 PM

This is the second installment of a two-part course in the principles and applications of optical metrology for the practical measurements of distance, alignment, form, transparent films, and surface texture. This physical-optics segment builds on topics covered in Part 1, although it is possible for participants already familiar with optics to follow this second half as a stand-alone tutorial. We begin by examining the dimensional metrology potential of the wave nature of light, using diffraction, interference, and holography. This provides the foundation for the operating principles of stage positioning interferometers, the testing of optical surfaces such as lenses and mirrors, holographic measurements of shape and deformation, and interference microscopy for surface structure analysis. Along the way, we will leverage physical optics for the evaluation of imaging metrology systems, including lateral resolution and fundamental limits of detection.

About ZYGO

Zygo Corporation is a worldwide supplier of advanced optical metrology systems, high precision optical components, and complex electro-optical system design and manufacturing services.
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