3D Interference Microscopy
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Optical Surface Profilers ZeGage™ ZeGage™ Plus NewView™ 9000  New! Nexview™NX2  New! Nomad™ Compass™ APM650™ Mx™ Software Profiler Objectives

Optical Profiler Basics Surface Roughness Measurement Surface Profiling 3D Optical Microscopy 3D Interference Microscopy


3D Interference Microscopy Choose the right 3D interference microscope for your surface metrology application

3D Interference Microscope Measurement of Defect in Diamond Like Carbon Coating
3D Interference Microscope Measurement of a Defect in Diamond Like Carbon (DLC) Coating

3D interference microscopes (also known as 3D optical microscopes, profilometers, and optical profilers) from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D interference microscopy of surface features.

3D interference microscopy utilizes two-beam division of amplitude interferometry to compare the sample surface to a reference surface, and is well suited for surface finish and topography measurement, transparent films analysis, and texture characterization.

Choosing the best interference microscope system for your application depends on your specific requirements, including precision, speed, automation, configuration flexibility, and vertical measurement range.

 ZeGage™
ZeGage Optical Profiler
STANDARD
PERFORMANCE
COMPACT DESIGN
WITH ROBUST
PERFORMANCE
SIMPLE TO USE,
ENTRY-LEVEL
BENCH-TOP SYSTEM
MEASURE IT RIGHT
ON THE SHOP FLOOR!
Learn More
 NewView™
NewView 9000 Optical Profiler
HIGH
PERFORMANCE
PERFORMANCE, FLEXIBILITY, AND
VALUE
WELL SUITED FOR
A WIDE RANGE OF
APPLICATIONS
CONFIGURABLE TO
MEET YOUR NEEDS!
Learn More
 Nexview™
Nexview NX2 Optical Profiler
ULTRA
PERFORMANCE
INDUSTRY-LEADING
SPEED, PRECISION
AND AUTOMATION
DESIGNED FOR THE
MOST DEMANDING
APPLICATIONS
MEASURE IT ALL –
AND FAST!
Learn More

Specialty Models

In addition to the our standard configurations, we have specialty models that apply CSI in a package tailored for specific applications which include:

Micro lenses and molds, spherical and aspherical
Compass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO's Compass™ system provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points.

Nomad portable optical profiler
Nomad™ – The Nomad™ portable optical profiler is the ideal solution for measuring surfaces that are too large for the measurement stage of a conventional workstation profiler. As with our other optical profilers, the Nomad portable profiler has sub-nanometer measurement precision that is independent of field magnification.

Packaging Metrology System for Panel-Based PCB's
APM650™ – The APM650™ packaging metrology system provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.

Profiler Objectives

Objectives for ZYGO Optical Profilers
Optical profiler objectives, mounted on a turret
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing. All ZYGO objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to ZYGO.

ZYGO also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.

Inquiry Form
Please use the form below to contact us with any questions you have regarding ZYGO's Optical Profiler systems, or surface profiling in general.

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