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Products
3D Optical Profilers
Laser Interferometers
Position Metrology Systems
Custom Metrology Solutions
Trade-in & Upgrade Program
Optical Surface Profilers ZeGage™ Pro New! NewView™ 9000 Nexview™NX2 Nomad™ Compass™ APM650™ Mx™ Software Profiler Objectives Optical Profiler Basics Surface Roughness Measurement Surface Profiling 3D Optical Microscopy 3D Interference Microscopy |
3D Interference Microscopy Choose the right 3D interference microscope for your surface metrology application3D interference microscopes (also known as 3D optical microscopes, profilometers, and optical profilers) from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D interference microscopy of surface features.3D interference microscopy utilizes two-beam division of amplitude interferometry to compare the sample surface to a reference surface, and is well suited for surface finish and topography measurement, transparent films analysis, and texture characterization.
Choosing the best interference microscope system for your application depends on your specific requirements, including precision, speed, automation, configuration flexibility, and vertical measurement range.
ZeGage™
STANDARD
PERFORMANCE COMPACT DESIGN
WITH ROBUST PERFORMANCE SIMPLE TO USE,
ENTRY-LEVEL BENCH-TOP SYSTEM MEASURE IT RIGHT
ON THE SHOP FLOOR! NewView™
HIGH
PERFORMANCE PERFORMANCE, FLEXIBILITY, AND
VALUE WELL SUITED FOR
A WIDE RANGE OF APPLICATIONS CONFIGURABLE TO
MEET YOUR NEEDS! Nexview™
ULTRA
PERFORMANCE INDUSTRY-LEADING
SPEED, PRECISION AND AUTOMATION DESIGNED FOR THE
MOST DEMANDING APPLICATIONS MEASURE IT ALL –
AND FAST! Specialty ModelsIn addition to the standard configurations, we have specialty models that apply CSI in a package tailored for specific applications which include:Compass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO's Compass™ system provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points. Nomad™ – The Nomad™ portable optical profiler is the ideal solution for measuring surfaces that are too large for the measurement stage of a conventional workstation profiler. As with our other optical profilers, the Nomad portable profiler has sub-nanometer measurement precision that is independent of field magnification. APM650™ – The APM650™ packaging metrology system provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm. Profiler ObjectivesThe performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing. All ZYGO objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to ZYGO.ZYGO also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives. Inquiry Form
Please use the form below to contact us with any questions you have regarding ZYGO's Optical Profiler systems, or surface profiling in general.
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