3D Interference Microscopy
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3D Interference Microscopy Choose the right 3D interference microscope for your surface metrology application

3D Interference Microscope Measurement of Defect in Diamond Like Carbon Coating
3D Interference Microscope Measurement of a Defect in Diamond Like Carbon (DLC) Coating

3D interference microscopes (also known as 3D optical microscopes, profilometers, and optical profilers) from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D interference microscopy of surface features.

3D interference microscopy utilizes two-beam division of amplitude interferometry to compare the sample surface to a reference surface, and is well suited for surface finish and topography measurement, transparent films analysis, and texture characterization.

Choosing the best interference microscope system for your application depends on your specific requirements, including precision, speed, automation, configuration flexibility, and vertical measurement range.


ZeGage 3D Interference Microscope ZeGage Plus 3D Interference Microscope NewView 8000 3D Interference Microscope Nexview 3D Interference Microscope Nomad Portable 3D Interference Microscope
Model: ZeGage
3D Interference Microscope		 ZeGage Plus
3D Interference Microscope		 NewView 8000
3D Interference Microscope		 Nexview
3D Interference Microscope		 Nomad
3D Interference Microscope
Configuration: Benchtop Workstation Portable
Core Technology: CSI* CSI & PSI* CSI*
STR: 3.5 nm 0.15 nm 0.12 nm 0.08 nm 0.12 nm
Vert. Scan Speed: ≤ 35 μm/s ≤ 73 μm/s ≤ 96 μm/s ≤ 15 μm/s
Max. Step Height: ≤ 20 mm ≤ 95 µm
System Zoom: Fixed Automated Fixed
Z Stage: Automated Motorized
X/Y Stage: Manual or Automated (optional) Automated N/A
Field of View: ≤ 9 mm ≤ 16 mm ≤ 12 mm
Software: Mx
Notes:  STR (Surface Topography Repeatability) is a quantification of instrument capability, per ISO 25178-604.  STR can be improved by filtering and/or measurement averaging.
* CSI = Coherence Scanning Interferometry
   PSI = Phase Shifting Interferometry

Specialty Models

Micro lenses and molds, spherical and aspherical
Compass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO's Compass™ 3D interference microscope provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points.

Packaging Metrology System for Panel-Based PCB's
APM650™ – The APM650™ packaging metrology system is a 3D interference microscope that provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.

Profiler Objectives

Objectives for ZYGO Optical Profilers
Optical profiler objectives, mounted on a turret
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing. All ZYGO objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to ZYGO.

ZYGO also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.

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