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3D Interference Microscopy Choose the right 3D interference microscope for your surface metrology application
3D Interference Microscope Measurement of a Defect in Diamond Like Carbon (DLC) Coating
3D interference microscopy utilizes two-beam division of amplitude interferometry to compare the sample surface to a reference surface, and is well suited for surface finish and topography measurement, transparent films analysis, and texture characterization.
Choosing the best interference microscope system for your application depends on your specific requirements, including precision, speed, automation, configuration flexibility, and vertical measurement range.
Specialty ModelsCompass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO's Compass™ 3D interference microscope provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points.
APM650™ – The APM650™ packaging metrology system is a 3D interference microscope that provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.
Profiler Objectivesobjectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing. All ZYGO objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to ZYGO.
ZYGO also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.
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Contact ZYGO today to learn more about Interference Microscopes!