Absolute Position Sensors

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Metrology Systems 3D Optical Profilers Laser Interferometers Nano-Position Sensors Custom Metrology Solutions

Nano-Position Sensors Displacement Measuring Interferometers Absolute Position Sensors

Applications OEM Services Stage Servo Control Adaptive Optics Control

ZPS™ User Interface Software

Absolute Position Sensors The ZPS™ system provides high-precision non-contact absolute position measurement on up to 64 synchronized channels.

Absolute Postion Sensor, ZYGO ZPS system
This small optical sensor is part of the ZPS absolute position measurement system.
Electronics Enclosure, ZYGO ZPS system
All electronics for the absolute position measurement system are housed in this rack-mountable enclosure.
Key Features:

• Non-contact optical measurement

• Repeatable absolute position measurement (≤ 0.5 nm, 3σ)

• High-precision system using proprietary compensation algorithms

• Ultra-compact sensors with no EMI sensitivity or heat generation

• Reliable telecom-proven fiber optic components

• Scalable, up to 64 channels

Fiber Optic Cabling, ZYGO ZPS system
ZYGO offers everything you need to integrate the ZPS system into your application, including fiber optic cables, sensor mounts, and user interface software.

ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.

The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.

The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables. ZYGO's complimentary ZPS™ software provides a plug-and-play connection between the ZPS system and your computer, allowing you to get up and running with your system quickly and easily.


The ZPS system is typically used in closed-loop feedback systems that require a continuous stream of high-precision position data from multiple sensors to compensate for drift and maintain precise positioning and alignment. The system can also be used as a tool in RD&E and manufacturing environments for alignment in test fixtures or to quantify dynamic mechanical performance.

Click on each of the thumbnail images below to see illustrations of sample applications.

Deformable Optics Measurement
Deformable Optics
  Lens Positioning Application
Lens Positioning
Mechanical Measurement Application
Mechanical Measurements
  Precision Stage Control Application Diagram
Precision Stage Control
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