3D Optical Profilers
Custom Metrology Solutions
Applications Form & Roughness of Precision Parts Form, Waviness, Roughness Surface Finish Regions Analysis New! Tribology Automated Image Inspection Step Height Thin Film Measurement Transmitted Wavefront Radius of Curvature Optical Homogeneity Position & Angle Measurement Stage Servo Control Adaptive Optics Control
Dynamic Metrology Surface Profiling Applications
Fast, non-contact surface topography
Full 3D static and dynamic metrology
Variable field-of-view and magnification
Large vertical scan range
Comprehensive data segmentation and
Compatible with diffuse or specular
To meet the challenges and varying needs of MEMS research and production, Zygo Corporation has developed the NewView™ series of 3D optical profilers for precise surface measurement and characterization of micro-devices. Employing leading-edge and patented scanning technology, the NewView™ enables non-contact surface profiling of smooth and rough surfaces, large steps, and thick films, for flexible and complete MEMS metrology on a single platform - with sub-nanometer resolution.
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