Position & Angle Measurement Displacement Measuring Interferometers

Some processes that benefit from this level of precision are: machine tool calibration, X-Y stage control in semiconductor photolithography, stage control and triggering in memory repair and wafer inspection, machine tool calibration, and diamond turning. Many different interferometer configurations are possible, with each designed to accomplish a specific type of measurement.

Angle Measurement - Measures changes in the angle of the target mirror with extreme precision. Shown is a DPMI configuration (Differential Plane Mirror Interferomter). The angular displacement reference mirror has two holes that are positioned such that the second pass of the beams is directed to the opposite mirror it reflected from on the first pass. The resultant output is an angular displacement whose resolution is based on the separation between the beams on the target mirror (less than 0.1 arc second).

ZYGO's ZMI™ Series of products are the industry leaders in displacement and angle measuring interferometer systems for your OEM application.

First Name *		Last Name *
Phone Number		E-mail Address *
Company or Organization *		Job Title or Function *
Street Address		City
State/Province *		Zip/Postal Code
---Select--- Alabama Alaska Arizona Arkansas California Colorado Connecticut Delaware District of Columbia Florida Georgia Hawaii Idaho Illinois Indiana Iowa Kansas Kentucky Louisiana Maine Maryland Massachusetts Michigan Minnesota Mississippi Missouri Montana Nebraska Nevada New Hampshire New Jersey New Mexico New York North Carolina North Dakota Ohio Oklahoma Oregon Pennsylvania Rhode Island South Carolina South Dakota Tennessee Texas Utah Vermont Virginia Washington West Virginia Wisconsin Wyoming Alberta British Columbia Manitoba New Brunswick Newfoundland and Labrador Northwest Territories Nova Scotia Nunavut Ontario Prince Edward Island Quebec Saskatchewan Yukon Territories International/Other
Country/Region *
---Select--- Afghanistan Albania Algeria Andorra Angola Antigua and Barbuda Argentina Armenia Australia Austria Azerbaijan Bahamas Bahrain Bangladesh Barbados Belarus Belgium Belize Benin Bhutan Bolivia, Plurinational State of Bonaire, Sint Eustatius and Saba Bosnia and Herzegovina Botswana Brazil Brunei Darussalam Bulgaria Burkina Faso Burundi Cambodia Cameroon Canada Cape Verde Central African Republic Chad Chile China Colombia Comoros Congo Congo, the Democratic Republic of the Costa Rica Cote d'Ivoire Croatia Cuba Cyprus Czech Republic Denmark Djibouti Dominica Dominican Republic Ecuador Egypt El Salvador Equatorial Guinea Eritrea Estonia Ethiopia Fiji Finland France Gabon Gambia Georgia Germany Ghana Greece Greenland Grenada Guatemala Guinea Guinea-Bissau Guyana Haiti Honduras Hungary Iceland India Indonesia Iran, Islamic Republic of Iraq Ireland Israel Italy Jamaica Japan Jordan Kazakhstan Kenya Kiribati Korea, Democratic People's Republic of Korea, Republic of Kuwait Kyrgyzstan Lao People's Democratic Republic Lebanon Lesotho Liberia Libya Liechtenstein Lithuania Luxembourg Madagascar Malawi Malaysia Maldives Mali Mauritania Mauritius Mexico Moldova, Republic of Monaco Mongolia Montenegro Morocco Mozambique Myanmar Namibia Nauru Nepal Netherlands New Zealand Nicaragua Niger Nigeria Norway Oman Pakistan Palestine Panama Papua New Guinea Paraguay Peru Philippines Poland Portugal Qatar Romania Russian Federation Rwanda Saint Helena, Ascension and Tristan da Cunha Saint Kitts and Nevis Saint Lucia Saint Vincent and the Grenadines Samoa San Marino Sao Tome and Principe Saudi Arabia Senegal Serbia Sierra Leone Singapore Slovakia Slovenia Solomon Islands Somalia South Africa South Sudan Spain Sri Lanka Sudan Suriname Swaziland Sweden Switzerland Syrian Arab Republic Taiwan (R.O.C.) Tajikistan Tanzania, United Republic of Thailand Timor-Leste Togo Tonga Trinidad and Tobago Tunisia Turkey Turkmenistan Tuvalu Uganda Ukraine United Arab Emirates United Kingdom United States Uruguay Uzbekistan Vanuatu Venezuela, Bolivarian Republic of Viet Nam Wallis and Futuna Yemen Zambia Zimbabwe
Check this box to provide consent for ZYGO to contact you in the future. **
Please indicate your level of interest... *
Current Need      Upcoming Need      Possible Need      Gathering Data
Please type your inquiry below:
* Required entries

Note:
If you experience any difficulty submitting this form, contact:

** You may withdraw this consent at any time using the "unsubscribe" link at the bottom of any page on this web site.