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Position & Angle Measurement Displacement Measuring Interferometers
Some processes that benefit from this level of precision are: machine tool calibration, X-Y stage control in semiconductor photolithography, stage control and triggering in memory repair and wafer inspection, machine tool calibration, and diamond turning. Many different interferometer configurations are possible, with each designed to accomplish a specific type of measurement.
Angle Measurement - Measures changes in the angle of the target mirror with extreme precision. Shown is a DPMI configuration (Differential Plane Mirror Interferomter). The angular displacement reference mirror has two holes that are positioned such that the second pass of the beams is directed to the opposite mirror it reflected from on the first pass. The resultant output is an angular displacement whose resolution is based on the separation between the beams on the target mirror (less than 0.1 arc second).
ZYGO's ZMI™ Series of products are the industry leaders in displacement and angle measuring interferometer systems for your OEM application.
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Contact ZYGO today to learn more about position and angle metrology!