3D Optical Profilers
Custom Metrology Solutions
Applications Form & Roughness of Precision Parts Form, Waviness, Roughness Surface Finish Regions Analysis New! Tribology Automated Image Inspection Step Height Thin Film Measurement Transmitted Wavefront Radius of Curvature Optical Homogeneity Position & Angle Measurement Stage Servo Control Adaptive Optics Control
2-Axis Vacuum DMI System Flat Panel DMI System
Stage Servo Control
Our ZMI™ displacement measuring interferometer sensors are used to measure relative motion of reticle/mask and wafer stages in these systems to the nanometer level. Our modularized components can be configured to provide all degrees of freedom necessary for your specific application to enable successful nanometer-level motion control. A single ZMI laser head is capable of measuring between 2 and 22 axis of measurement, allowing for a fully synchronous measurement across all axes.
As your partner in motion control, you can expect ZYGO to be there to support your continuous system improvements and provide a path forward towards your next generation requirements.
Contact ZYGO today to discover how to we can help close the loop between your system requirements and your system performance.
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