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Metrology Systems 3D Optical Profilers Laser Interferometers Nano-Position Sensors Custom Metrology Solutions

Applications Form & Roughness of Precision Parts Form, Waviness, Roughness Surface Finish Regions Analysis  New! Tribology Automated Image Inspection Step Height Thin Film Measurement Transmitted Wavefront Radius of Curvature Optical Homogeneity Position & Angle Measurement Stage Servo Control Adaptive Optics Control

Stage Servo Control Application Examples
2-Axis Vacuum DMI System Flat Panel DMI System

Stage Servo Control

With over 30 years of experience, ZYGO's nano-position sensing products have become one of the most trusted, delivering continuous operation with exceptional performance. ZYGO is a market leader in displacement sensors providing feedback for closed loop servo control on an OEM basis. Semiconductor and flat panel manufacturing and process control tools in production today rely on ZYGO sensors to provide the precision and reliability needed for high volume manufacturing environments.

Our ZMI™ displacement measuring interferometer sensors are used to measure relative motion of reticle/mask and wafer stages in these systems to the nanometer level. Our modularized components can be configured to provide all degrees of freedom necessary for your specific application to enable successful nanometer-level motion control. A single ZMI laser head is capable of measuring between 2 and 22 axis of measurement, allowing for a fully synchronous measurement across all axes.

Application Examples

As your partner in motion control, you can expect ZYGO to be there to support your continuous system improvements and provide a path forward towards your next generation requirements.

Contact ZYGO today to discover how to we can help close the loop between your system requirements and your system performance.

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