Optical Surface Profilers
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Verifire™ MST Interferometer System for Multiple Surface Testing
The Verifire™ MST starts with the classical interferometer applications. These applications all measure the wavefront variations between two surfaces, a two-surface cavity. However, measuring an uncoated parallel plate gives two layered interferograms (a three-surface cavity) that confuse standard Phase Shift Interferometry algorithms.
ZYGO has solved this problem using wavelength shifting of phase, and ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI). The Verifire™ MST can measure two-surface, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, all within ZYGO's Mx™ software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.
Simultaneously measures two-surface, three- and even four-surface cavities.
Measures front surface map, optical thickness variation, and the back surface approximation.
Available in: 633 nm, 1.053 µm and 1.55 µm wavelengths.
Greatly simplifies homogeneity metrology.
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Contact ZYGO today to learn more about the Verifire MST!