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Verifire™ MST Interferometer System for Multiple Surface Testing
The Verifire™ MST starts with the classical interferometer applications. These applications all measure the wavefront variations between two surfaces, a two-surface cavity. However, measuring an uncoated parallel plate gives two layered interferograms (a three-surface cavity) that confuse standard Phase Shift Interferometry algorithms.
ZYGO has solved this problem using wavelength shifting of phase, and ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI). The Verifire™ MST can measure two-surface, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, all within ZYGO's Mx™ software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.
Simultaneously measures two-surface, three- and even four-surface cavities.
Measures front surface map, optical thickness variation, and the back surface approximation.
Available in: 633 nm, 1.053 µm and 1.55 µm wavelengths.
Greatly simplifies homogeneity metrology.
Inquiry FormPlease use the form below to contact us with any questions you have regarding ZYGO's Verifire MST interferometer system, or interferometry in general.
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