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Large Aperture Interferometry Measure optics up to 32 inches (800 mm) without data stitching.
12-inch Large Aperture Interferometer System Measuring Thin Glass
24-inch Large Aperture Interferometer System
Measuring Large OpticsZYGO's large aperture systems employ a folded-path beam expander to enlarge the 4-inch output beam of the interferometer to a larger size (12", 18" 24" or 32") so as to enable measurement of larger components, without the need for data stitching (although, data can still be stitched if you want to measure an optic larger than the aperture).
The Verifire MST Interferometer is key to enabling these large metrology systems. Phase Measuring Receptacles (PMR's) are available only up to 18" aperture due to their size and weight. Since the Verifire MST system uses wavelength-shifting rather than phase-shifting, it does not require a PMR. This makes it possible to use larger beam expanders – 24" and 32" – without a PMR, with no loss of functionality.
ZYGO's large aperture systems offer the unique capability of maintaining two independent metrology cavities – one with the nominal interferometer aperture, and the other at the larger aperture size. An optical "switch" enables you to quickly and easily select between the two.
When configured with the proper accessories, large aperture systems can be used to measure both surface form and transmitted wavefront quality, including thin glass, homogeneity/TTV, and near IR and short-wave IR wavelengths.
Capable of Much More than Testing Large OpticsExplore these important features and capabilities of the Verifire™ MST interferometer system...
Inquiry FormPlease use the form below to contact us with any questions you have regarding the measurement of large optics with ZYGO's Verifire MST interferometer system, or interferometry in general.
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