The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
Animated comparison of a PSI measurement with fringe print-through due to vibration, and the same surface measured with QPSI™ technology – free of noisy print-through.
Integrated transmission element.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.
The Verifire XL system includes ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.
The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.
ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes SmartAveraging® technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations.
12" (300 mm) aperture
Compact footprint, self-contained system
Easy part loading and alignment
Simple setup and streamlined operation
Built-in pre-aligned transmission flat
Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments
Please use the form below to contact us with any questions you have regarding ZYGO's Verifire XL interferometer system, or interferometry in general.
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