AMETEK, Inc. Logo
Products 3D Optical Profilers Laser Interferometers Position Metrology Systems Custom Metrology Solutions Trade-in & Upgrade Program

Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems

Stage Position Metrology ZMI™ Series Displacement Measuring Interferometers

ZMI™ System
Key Features:

• Heterodyne displacement interferometry.

• Highly stable, easy to align, and insensitive to signal amplitude changes.

• Extremely robust for OEM applications.

• A single laser source can support multiple axes.

• High signal to noise phase measurements enable high precision and eliminate false counts, even at zero slew rates.

Absolute Position Measurement:
ZYGO also makes high-precision Absolute Position Measurement systems which provide high-precision non-contact measurements of position over a range of 1.2 mm, on up to 64 synchronized channels, using ultra-compact sensors that are easily integrated into applications such as deformable mirrors and lens positioning.
ZYGO is the technology and application support leader in position metrology and heterodyne displacement interferometry, offering complete solutions and support for your OEM metrology application. ZYGO's technologies and OEM products have been field proven over many years of use in leading-edge production facilities.

Typical Applications

• Lithography tools: optical lithography steppers and scanners, e-beam & laser mask writers

• Metrology tools: Mask and wafer inspection and measurement tools, CD-SEMs

• Calibration: Measurement and calibration of high resolution or high frequency mechanical motions

Configure the System that's Exacty Right for You

ZYGO offers a variety of...

Laser Heads
Interferometers & Optics
Measurement Electronics
Cables & Feedthroughs

This modular approach allows you to configure a system that best suits your needs by selecting the most appropriate components. Be sure to review the system configuration examples.

As always, we're here to help; contact your local ZYGO sales representative to assist with the selections.

Inquiry Form
Please use the form below to contact us with any questions you have regarding ZYGO's Stage Position Metrology systems.

First Name * Last Name *
Phone Number E-mail Address *
Company or Organization * Job Title or Function *
Street Address City
State/Province * Zip/Postal Code
Country/Region *
  Check this box to provide consent for ZYGO to contact you in the future. **
Please indicate your level of interest... *
 Current Need      Upcoming Need      Possible Need      Gathering Data
Please type your inquiry below:
* Required entries  

If you experience any difficulty submitting this form, contact:

** You may withdraw this consent at any time using the "unsubscribe" link at the bottom of any page on this web site.

By continuing to use this site, you agree to our Privacy and Cookie Policy. OK

Manuals Technical Papers

Note: Login Required to download Application Notes; Click for details.

Contact ZYGO Today

Social Media Icons LinkedIn Twitter Facebook YouTube
  Privacy and Cookie Policy        Privacy Policy Inquiry Form        Unsubscribe
× Enter the email address you would like to unsubscribe from future contact...


Or, if you have a question, please use our Privacy Policy Inquiry form.