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Stage Position Metrology ZMI™ Series Displacement Measuring Interferometers
Heterodyne displacement interferometry.
Highly stable, easy to align, and insensitive to signal amplitude changes.
Extremely robust for OEM applications.
A single laser source can support multiple axes.
High signal to noise phase measurements enable high precision and eliminate false counts, even at zero slew rates.
Lithography tools: optical lithography steppers and scanners, e-beam & laser mask writers
Metrology tools: Mask and wafer inspection and measurement tools, CD-SEMs
Calibration: Measurement and calibration of high resolution or high frequency mechanical motions
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