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Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems

Example Systems 2-Axis System 2-Axis System (Vacuum) 3-Axis System Flat Panel Application


Example Systems ZMI™ Series - Displacement Measuring Interferometers

ZMI™ components can be assembled in a wide variety of configurations. The example systems below show some typical configurations used by ZMI™ customers.

2-Axis System
2-Axis System (Vacuum)
3-Axis System
Flat Panel Application


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