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3D Optical Profilers
Laser Interferometers
Position Metrology Systems
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Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems Example Systems 2-Axis System 2-Axis System (Vacuum) 3-Axis System Flat Panel Application |
2-Axis System Example Systems - ZMI™ SeriesThis 2-axis ZMI™ system uses the 7705 laser and 501A measurement enclosure to provide a compact, high-accuracy displacement measurement system. The 501A simultaneously outputs quadrature signals for motion control and parallel signals for digital signal processing.Click to see Bill of Materials
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