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Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems
Example Systems 2-Axis System 2-Axis System (Vacuum) 3-Axis System Flat Panel Application
2-Axis System Example Systems - ZMI™ Series
Click to see Bill of Materials
Key ZMI™ Components |
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| Item | Qty | Description | Part # |
| 1 | 1 | ZMI™ 7705 Laser, 4mm Beam, Class II, 250µW | 8070-0902-13 |
| 2 | 1 | 50% Beam splitter | 6191-0138-02 |
| 3 | 2 | Fold Mirror | 6191-0138-03 |
| 4 | 2 | High Stability Interferometer (HSPMI) | 6191-0318-02 |
| 5 | 2 | Fiber Optic Pickup (FOP) | 8040-0103-01 |
| 6 | 1 | ZMI™ 501A Electronics Enclosure (2-axis) | 8020-0237-05 |
| 7 | 3 | Fiber Optic Cable, 10m | 8020-0410-04 |
Optional ZMI™ Components |
Item | Qty | Description | Part # |
| 1 | 3 | Beam splitter/Fold Mirror Mount | 6191-0445-01 |
| 2 | 2 | Interferometer Mount | 6191-0446-01 |
| 3 | 1 | Power supply for electronics and laser | 8010-0105-01 |
| 4 | 1 | Power cable from power supply to laser | 1115-801-746 |
| 5 | 1 | Power cable from power supply to 501A enclosure | 1115-801-745 |
Other Optional Items |
Item | Description | Suggested Suppliers |
| 1 | Power supply for laser only (+15V DC) | ZYGO (1115-801-569), Digikey Corp., Agilent | |
| 2 | Neutral Density (ND) filters, alignment mirrors, etc. | Edmund Optics, Thorlabs, CVI/Melles Griot | |
| 3 | Digital I/O for ZMI™ 501A parallel output | National Instruments, Measurement Computing | |
| 4 | Motion control electronics | Delta Tau, ACS, Aerotech, Copley Controls, Galil | |
| 5 | Custom cables and cable components | Digikey Corp. | |
Technical Papers 
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