Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems
Example Systems 2-Axis System 2-Axis System (Vacuum) 3-Axis System Flat Panel Application
2-Axis System (Vacuum) Example Systems - ZMI™ Series
Light from the 7702 laser travels through a vacuum window into the vacuum system, where it is distributed with beam splitters and fold mirrors. The modular design of ZMI™ components allows great flexibility for positioning the interferometers inside the vacuum system. Measurement signals are collected by the fiber optic pickups in the vacuum system and transmitted through a vacuum feedthrough to the 2402 measurement board.
Click to see Bill of Materials
Key ZMI™ Components |
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| Item | Qty | Description | Part # |
| 1 | 1 | ZMI™ 7702 Laser, 6mm Beam, Class II, 400µW | 8070-0102-01 |
| 2 | 1 | ZMI™ 2402 Measurement Board (2-axis) with Ethernet | 8020-0104-06 |
| 3 | 1 | 50% Beam splitter, vacuum compatible | 6187-0138-02 |
| 4 | 2 | Fold Mirror, vacuum compatible | 6187-0138-03 |
| 5 | 2 | Compact Interferometer (HSPMI), vacuum compatible | 6187-0541-01 |
| 6 | 2 | Fiber optic pickup | 8040-0128-01 |
| 7 | 1 | Fiber optic feedthrough, 2-axis | 6185-0119-01 |
| 8 | 3 | Fiber optic cable assembly, 10 m | 8020-0410-04 |
Optional ZMI™ Components |
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| Item | Qty | Description | Part # |
| 1 | 1 | Laser head power cable for ZYGO chassis, 5 m | 8020-0408-02 |
| 2 | 2 | Compact Interferometer Mount, 1-axis, vacuum compatible | 8050-0109-01 |
| 3 | 3 | Beam splitter/fold mirror mount, vacuum compatible | 6187-0445-01 |
Other Optional Items |
Item | Description | Suggested Suppliers |
| 1 | VME Chassis for ZMI™ 2400 Measurement Boards | Schroff (Pentair), Carlo Gavazzi | |
| 2 | Interface between PC and VME bus (PCI/VME, USB/VME, etc.) | National Instruments, Phoenix Mecano (Wiener Group) | |
| 3 | Power supply for ZMI™ Laser (± 15 VDC) | ZYGO (8010-0105-0X), Digikey Corp., Agilent | |
| 4 | Neutral Density (ND) filters, alignment mirrors, vacuum windows, etc. | Edmund Optics, Thorlabs, CVI/Melles Griot | |
| 5 | Digital I/O for ZMI™ P2 bus | National Instruments, Measurement Computing | |
| 6 | Motion Control Electronics | Delta Tau, ACS, Aerotech, Copley Controls, Galil | |
| 7 | Custom cables and cable components | Digikey Corp. | |
Manuals 
Technical Papers 
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