2-Axis System (Vacuum) Example Systems - ZMI™ Series

ZYGO has a full line of vacuum compatible interferometers and feedthroughs for applications ranging from 2-axis systems to complex multi-axis vacuum applications. This example ZMI™ system uses the 7702 laser, a 2402 2-axis VME measurement board, and vacuum-compatible, compact interferometers.

Light from the 7702 laser travels through a vacuum window into the vacuum system, where it is distributed with beam splitters and fold mirrors. The modular design of ZMI™ components allows great flexibility for positioning the interferometers inside the vacuum system. Measurement signals are collected by the fiber optic pickups in the vacuum system and transmitted through a vacuum feedthrough to the 2402 measurement board.

Key ZMI™ Components
Item	Qty	Description	Part #
1	1	ZMI™ 7702 Laser, 6 mm Beam	8070-0102-31
2	1	ZMI™ 2402 Measurement Board (2-axis) with Ethernet	8020-0104-16
3	1	50% Beam splitter, vacuum compatible	6187-0138-02
4	2	Fold Mirror, vacuum compatible	6187-0138-03
5	2	HSPMI, Straight Through, Vacuum Compatible	6187-0318-02
6	2	Fiber optic pickup	8040-0128-01
7	2	Fiber Optic Cable Assembly, 3 m Vacuum Compatible	8020-0410-34
8	1	Fiber Optic Feedthrough, 2-Axis	6185-0119-01
9	3	Fiber optic cable assembly, 10 m	8020-0410-04
Optional ZMI™ Components
Item	Qty	Description	Part #
1	1	Laser Head Power & Communications Cable	1115-801-346
2	2	Interferometer Mount, Vacuum Compatible	6187-0446-01
3	3	Beam splitter/fold mirror mount, vacuum compatible	6187-0445-01

Other Optional Items
Item	Description	Suggested Suppliers
1	VME Chassis for ZMI™ 2400 Measurement Boards	Schroff (Pentair), Carlo Gavazzi
2	Interface between PC and VME bus (PCI/VME, USB/VME, etc.)	Phoenix Mecano (Wiener Group), Strucke
3	Power supply for ZMI™ Laser (± 15 VDC)	ZYGO (8010-0105-0X), Digikey Corp., Agilent
4	Neutral Density (ND) filters, alignment mirrors, vacuum windows, etc.	Edmund Optics, Thorlabs, CVI/Melles Griot
5	Digital I/O for ZMI™ P2 bus	National Instruments, Measurement Computing
6	Motion Control Electronics	Delta Tau, ACS, Aerotech, Copley Controls, Galil
7	Custom cables and cable components	Digikey Corp.