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Metrology Systems
3D Optical Profilers
Laser Interferometers
Nano-Position Sensors
Custom Metrology Solutions
Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems Example Systems 2-Axis System 2-Axis System (Vacuum) 3-Axis System Flat Panel Application |
2-Axis System (Vacuum) Example Systems - ZMI™ SeriesZYGO has a full line of vacuum compatible interferometers and feedthroughs for applications ranging from 2-axis systems to complex multi-axis vacuum applications. This example ZMI™ system uses the 7702 laser, a 2402 2-axis VME measurement board, and vacuum-compatible, compact interferometers.Light from the 7702 laser travels through a vacuum window into the vacuum system, where it is distributed with beam splitters and fold mirrors. The modular design of ZMI™ components allows great flexibility for positioning the interferometers inside the vacuum system. Measurement signals are collected by the fiber optic pickups in the vacuum system and transmitted through a vacuum feedthrough to the 2402 measurement board.
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