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Metrology Systems
3D Optical Profilers
Laser Interferometers
Nano-Position Sensors
Custom Metrology Solutions
Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems Interferometers & Optics Standard Series Differential Series Compact Series Beam splitters & Fold Mirrors Fiber Optic Pickups |
Interferometers & Optics ZMI™ Series - Displacement Measuring Interferometers
Key Features
• One, two, and three-axis interferometers. • Full line of vacuum-compatible interferometers. • Compact interferometers for space-constrained applications. • Interferometers for custom applications. The Standard Series of single-axis interferometers accommodates input beam sizes up to 8 mm. Most of these interferometers are re-configurable to be used in either a straight-through or right-angle orientation. The Differential Series of interferometers measure the relative displacement between two target mirrors. The Compact Series of interferometers have a low profile and use small 3-mm beams to accommodate small target mirrors. One, two, and three-axis versions are available. Beam splitters & fold mirrors are used to split light from the laser into multiple paths, one for each interferometer.
ZYGO's range of fiber optic pickups features a low-cost model for non-vacuum applications and two fully vented epoxy-free designs for vacuum and non-vacuum use.
Inquiry Form
Please use the form below to contact us with any questions you have regarding ZYGO's Stage Position Metrology systems.
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