|Metrology Systems 3D Optical Profilers Laser Interferometers Nano-Position Sensors Custom Metrology Solutions||
Interferometers & Optics ZMI™ Series - Displacement Measuring Interferometers
• One, two, and three-axis interferometers.
• Full line of vacuum-compatible interferometers.
• Compact interferometers for space-constrained applications.
• Interferometers for custom applications.
The Standard Series of single-axis interferometers accommodates input beam sizes up to 8 mm. Most of these interferometers are re-configurable to be used in either a straight-through or right-angle orientation.
The Differential Series of interferometers measure the relative displacement between two target mirrors.
The Compact Series of interferometers have a low profile and use small 3-mm beams to accommodate small target mirrors. One, two, and three-axis versions are available.
Beam splitters & fold mirrors are used to split light from the laser into multiple paths, one for each interferometer.
ZYGO's range of fiber optic pickups features a low-cost model for non-vacuum applications and two fully vented epoxy-free designs for vacuum and non-vacuum use.
Inquiry FormPlease use the form below to contact us with any questions you have regarding ZYGO's Stage Position Metrology systems.
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