AMETEK, Inc. Logo
Products 3D Optical Profilers Laser Interferometers Position Metrology Systems Custom Metrology Solutions Trade-in & Upgrade Program

Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems

Interferometers & Optics Standard Series Differential Series Compact Series Beam splitters & Fold Mirrors Fiber Optic Pickups


Standard Series Interferometers ZMI™ Series - Displacement Measuring Interferometers

High Performance HSPMI
These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets.

ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.

Description: HSPMI High performance HSPMI Single beam Interferometer (SBI) Linear Interferometer (LI)
Part Number: 6191-0318-0X 8080-0360-XX 6191-0553-01 6191-0135-01
Measurement: Displacement
Number of axes: 1
Target: Plane Mirror Small Retroreflector
6191-0550-01
Std. Retroreflector
6191-0438-02
Optical Resolution: λ/4 λ/2
Maximum Input Beam Size: 8 mm
Vacuum Compatible Version Available: Yes
Fiber Optic Pickup Mounting Method: Mounting features included Factory mounted Mounting features included
Interferometer Mount: 6191-0446-01 6191-0445-01 6191-0446-01
Precision Adjustable Mount: 6191-0310-01 6191-0310-02 6191-0310-01
[close]
By continuing to use this site, you agree to our Privacy and Cookie Policy. OK

Spec Sheets Manuals Technical Papers

Note: Login Required to download Application Notes; Click for details.

Contact ZYGO Today
What's New at ZYGO?
Visit ZYGO at these
Upcoming Events:
TPCA, Taiwan 10/24
JIMTOF 2018 11/01
ASPE Annual Meeting 11/06
MRS Fall Meeting 11/27
Performance Racing 12/06
(Click for a complete list)

Social Media Icons LinkedIn Twitter Facebook Google+ YouTube
  Privacy and Cookie Policy        Privacy Policy Inquiry Form        Unsubscribe
× Enter the email address you would like to unsubscribe from future contact...

 

Or, if you have a question, please use our Privacy Policy Inquiry form.