|Products Optical Surface Profilers Laser Interferometers Absolute Position Measurement Semiconductor Systems Stage Position Metrology Trade-in & Upgrade Program New!||
Standard Series Interferometers ZMI™ Series - Displacement Measuring Interferometers
ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.
Contact ZYGO today to learn more about ZMI™ Series Interferometers!