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Standard Series Interferometers ZMI™ Series - Displacement Measuring Interferometers

High Performance HSPMI
These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets.

ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.

Description: HSPMI High performance HSPMI Single beam Interferometer (SBI) Linear Interferometer (LI)
Part Number: 6191-0318-0X 8080-0360-XX 6191-0553-01 6191-0135-01
Measurement: Displacement
Number of axes: 1
Target: Plane Mirror Small Retroreflector
6191-0550-01
Std. Retroreflector
6191-0438-02
Optical Resolution: λ/4 λ/2
Maximum Input Beam Size: 8 mm
Vacuum Compatible Version Available: Yes
Fiber Optic Pickup Mounting Method: Mounting features included Factory mounted Mounting features included
Interferometer Mount: 6191-0446-01 6191-0445-01 6191-0446-01
Precision Adjustable Mount: 6191-0310-01 6191-0310-02 6191-0310-01
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