AMETEK, Inc. Logo
Metrology Systems 3D Optical Profilers Laser Interferometers Nano-Position Sensors Custom Metrology Solutions

Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems

Measurement Electronics ZMI™ Series - Displacement Measuring Interferometers

ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.

The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.

The ZMI™ 240X, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.

For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates a common non-linear error intrinsic in DMI systems.

Model: 501A 2400 4004 4104(C)
Number of Axes/Board: 2 1 or 2 4
Board Type: Enclosure 6U VME 6U VME64x
Minimum Optical Power: 8.0 µW 1.9 µW 1.0 µW 0.07 µW
Position Resolution: 1.24 nm 0.31 nm 0.15 nm
Max. Velocity: ±0.475 m/s ±2.1 m/s ±2.55 m/s
Accuracy at Max Velocity (σ): 1.6 nm 0.5 nm 0.2 nm
Cyclic Error Compensation: No Yes
Compatible Laser(s): 7705 7702, 7714, and 7724

Note: Specifications are for double-pass interferometers.
Inquiry Form
Please use the form below to contact us with any questions you have regarding ZYGO's Stage Position Metrology systems.

First Name * Last Name *
Phone Number E-mail Address *
Company or Organization * Job Title or Function *
Street Address City
State/Province  Zip/Postal Code
Country/Region *
  Check this box to provide consent for ZYGO to contact you in the future. **
Please indicate your level of interest... *
 Current Need      Upcoming Need      Possible Need      Gathering Data
Please type your inquiry below:
* Required entries
Required for USA and Canada

If you experience any difficulty submitting this form, contact:

** You may withdraw this consent at any time using the "unsubscribe" link at the bottom of any page on this web site.

By continuing to use this site, you agree to our Privacy and Cookie Policy. OK

Spec Sheets Manuals Technical Papers

Note: Login Required to download Application Notes; Click for details.

Contact ZYGO Today
What's New at ZYGO?
Social Media Icons LinkedIn Twitter Facebook YouTube
  Privacy and Cookie Policy        Privacy Policy Inquiry Form        Unsubscribe
× Enter the email address you would like to unsubscribe from future contact...


Or, if you have a question, please use our Privacy Policy Inquiry form.