|Metrology Systems 3D Optical Profilers Laser Interferometers Nano-Position Sensors Custom Metrology Solutions||
Measurement Electronics ZMI™ Series - Displacement Measuring InterferometersZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.
The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.
The ZMI™ 240X, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.
For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates a common non-linear error intrinsic in DMI systems.
Inquiry FormPlease use the form below to contact us with any questions you have regarding ZYGO's Stage Position Metrology systems.
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