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Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems

Stage Position Metrology ZMI™ Series Displacement Measuring Interferometers

ZMI™ System
Key Features:

• Heterodyne displacement interferometry.

• Highly stable, easy to align, and insensitive to signal amplitude changes.

• Extremely robust for OEM applications.

• A single laser source can support multiple axes.

• High signal to noise phase measurements enable high precision and eliminate false counts, even at zero slew rates.

Absolute Position Measurement:
ZYGO also makes high-precision Absolute Position Measurement systems which provide high-precision non-contact measurements of position over a range of 1.2 mm, on up to 64 synchronized channels, using ultra-compact sensors that are easily integrated into applications such as deformable mirrors and lens positioning.
ZYGO is the technology and application support leader in position metrology and heterodyne displacement interferometry, offering complete solutions and support for your OEM metrology application. ZYGO's technologies and OEM products have been field proven over many years of use in leading-edge production facilities.

Typical Applications

• Lithography tools: optical lithography steppers and scanners, e-beam & laser mask writers

• Metrology tools: Mask and wafer inspection and measurement tools, CD-SEMs

• Calibration: Measurement and calibration of high resolution or high frequency mechanical motions

Configure the System that's Exacty Right for You

ZYGO offers a variety of...

Laser Heads
Interferometers & Optics
Measurement Electronics
Cables & Feedthroughs

This modular approach allows you to configure a system that best suits your needs by selecting the most appropriate components. Be sure to review the system configuration examples.

As always, we're here to help; contact your local ZYGO sales representative to assist with the selections.

Inquiry Form
Please use the form below to contact us with any questions you have regarding ZYGO's Stage Position Metrology systems.

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Manuals Technical Papers

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Contact ZYGO today to learn more about the ZMI™ Series!

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