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Stage Position Metrology ZMI™ Series Displacement Measuring Interferometers
Heterodyne displacement interferometry.
Highly stable, easy to align, and insensitive to signal amplitude changes.
Extremely robust for OEM applications.
A single laser source can support multiple axes.
High signal to noise phase measurements enable high precision and eliminate false counts, even at zero slew rates.
Absolute Position Measurement:
ZYGO also makes high-precision Absolute Position Measurement systems which provide high-precision non-contact measurements of position over a range of 1.2 mm, on up to 64 synchronized channels, using ultra-compact sensors that are easily integrated into applications such as deformable mirrors and lens positioning.
Lithography tools: optical lithography steppers and scanners, e-beam & laser mask writers
Metrology tools: Mask and wafer inspection and measurement tools, CD-SEMs
Calibration: Measurement and calibration of high resolution or high frequency mechanical motions
Configure the System that's Exacty Right for YouZYGO offers a variety of...
system configuration examples.
As always, we're here to help; contact your local ZYGO sales representative to assist with the selections.
Inquiry FormPlease use the form below to contact us with any questions you have regarding ZYGO's Stage Position Metrology systems.
Contact ZYGO today to learn more about the ZMI™ Series!