Position Metrology Systems

Products 3D Optical Profilers Laser Interferometers Position Metrology Systems Custom Metrology Solutions Trade-in & Upgrade Program  New!

Position Metrology Systems High precision non-contact solutions for stage position and absolute position metrology applications

ZMI Stage Position Metrology System
Stage Position Metrology System
The ZMI™ displacement measuring interferometer system precisely measures relative changes in distance to a target. The system uses heterodyne interferometry technology, making it insensitive to signal amplitude changes and therefore extremely stable and robust. OEM applications include optical lithography steppers and scanners, e-beam and laser mask writers, as well as semiconductor inspection equipment.   Learn more...

Absolute Position Measurement System
The ZPS™ system provides high-precision non-contact absolute position measurement over a range of 1.2 mm on up to 64 synchronized channels. The ultra-compact optical sensors are easily integrated into high-end applications such as deformable mirrors, precision optical systems, and nanopositioning stages. The sensors generate virtually no heat and are insensitive to electromagnetic interference.  Learn more...


Inquiry Form
Please use the form below to contact us with any questions you have regarding ZYGO Position Metrology products.

First Name * Last Name *
Phone Number E-mail Address *
Company or Organization * Job Title or Function*
Street Address City
State/Province * Zip/Postal Code
Country *
If you experience any difficulty submitting this form, please contact:
Please indicate your level of interest... *
 Current Need      Upcoming Need      Possible Need      Gathering Data
Please type your inquiry below:
* Required entries  

Note: If you experience any difficulty submitting this form, please contact: webmaster@zygo.com

AMETEK, Inc. Logo
Social Media Icons LinkedIn Twitter Facebook Google+ YouTube