ZYGO nano-position sensors are widely used in closed-loop motion control systems, mainly for lithography and inspection tool staging, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs.
Displacement Measuring Interferometers
ZYGO's ZMI™ systems use uses heterodyne interferometer technology to precisely measure relative changes in position.
Absolute Position Sensors
ZYGO's ZPS™ system uses ultra-compact non-contact optical sensors to measure absolute position over a range of 1.2 mm on up to 64 synchronized channels.
ZYGO's position measurement sensors have been used in OEM applications for over 30 years. We understand that you need to have a trusted partner to provide innovative position metrology solutions with reliable operation and consistent, on-time delivery.
Stage Servo Control
Over the past 30 years, ZYGO's nano-position sensing products have become one of the most trusted, delivering exceptional performance during continuous operation. Semiconductor and flat panel manufacturers rely on ZYGO sensors to provide the precision and reliability needed for their high-volume operations.
Adaptive Optics Control
Gain finer control of your adaptive optics by knowing how they are actually deforming! ZPS™ offers a massively parallel arrangement of up to 64 small-footprint sensors to directly measure the front or rear surface of a mirror or other optic, allowing you to reconstruct the surface deformation for best aberration correction.
Products3D Optical Profilers Laser Interferometers Nano-Position Sensors Precision Optical
Components & Systems
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