Nano-Position Sensors

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Pico-Scale Position Measurement
3D Optical Profilers
Laser Interferometers
Nano-Position Sensors
Precision Optical
Components & Systems

Nano-Position Sensors

ZYGO nano-position sensors are widely used in closed-loop motion control systems, mainly for lithography and inspection tool staging, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs.

ZMI Stage Position Metrology System
Displacement Measuring Interferometers
ZYGO's ZMI™ systems use uses heterodyne interferometer technology to precisely measure relative changes in position.
ZPS Absolute Position Sensor
Absolute Position Sensors
ZYGO's ZPS™ system uses ultra-compact non-contact optical sensors to measure absolute position over a range of 1.2 mm on up to 64 synchronized channels.
Applications
Zygo Corporation
Laurel Brook Road
Middlefield, CT  06455
800-ZYGO-NOW inquire@zygo.com
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