PCB Panel Inspection, 2D & 3D

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APM650™ Packaging Metrology System

PCB inspection system - APM650
APM650 metrology system, for inspection of panel-based PCBs and other advanced semiconductor packaging applications.
Trace width, height, space, roughness
Trace - width, height, space, roughness
  Depth, top and bottom diameter/roughness
Via Hole - depth, top and bottom diameter, roughness
Recess via depth and height
Via Recess - depth and height
  Alignment Mark - offset DX, DY, TP
Alignment Mark - offset DX, DY, TP
SRO Pad - depth, top and bottom diameter
SRO Pad - depth, top and bottom diameter
  Surface Roughness - Ra for all surfaces
Surface Roughness - Ra for all surfaces
Solder Bump
Solder Bump - width, height, coplanarity, spacing

The APM650™ packaging metrology system is a new inspection tool for automated measurement of panel-based PCBs and other advanced packaging applications. It provides 2D & 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision.

Powerful Performance

Coherence Scanning Interferometry (CSI) is the measurement technology at the core of the APM650 system.

This non-contact technique provides high-precision, and high-value surface metrology benefits including:

• Measures virtually all types of surfaces, from rough to super smooth, including thin films, steep slopes, and large steps.

• Sub-nanometer measurement precision is independent of field magnification

• Gage capable performance - exceptional precision and repeatability for the most demanding production applications.

• SureScan™ vibration tolerance technology - robust operation in virtually any environment.

Mx™ software enables seamless data exchange with other ZYGO Profilers including ZeGage, NewView 8000, and Nexview.

Maximize ROI

With a metrology area that accommodates lateral dimensions up to 650 x 650 mm, the APM650 system accommodates even the largest of today's PCB substrate panels, ensuring that the system provides value for years to come.

Customized chucks and sample holders are available to adapt the system for smaller panels or even singulated substrates to maximize application flexibility. And the system's integrated recipe-driven automation software enables hands-free metrology of multiple features on each panel, all in a single workstation, reducing production time and increasing process knowledge.

Inquiry Form
Please use the form below to contact us with any questions you have regarding the APM650 PCB inspection system 3D Optical Surface Profilers, or surface profiling in general.

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Contact ZYGO today to learn more about the APM650™ Packaging Metrology System!

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