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Metrology Systems 3D Optical Profilers Laser Interferometers Nano-Position Sensors Custom Metrology Solutions

3D Optical Profilers ZeGage™ Pro NewView™ 9000 Nexview™ NX2

Key Features SmartSetup™ Surescan™ Mx™ Software Profiler Objectives

Special Configurations OEM 3D Optical Profiler Compass™ APM650™ Guardian™ Industrial Enclosure

Reference Information
Optical Profiler Basics Surface Roughness Measurement Surface Profiling

Mx™ Software Instrument Control & Data Analysis Software for ZYGO 3D Optical Surface Profilers

Mx software - analysis and control for the Nexview profiler
Mx Software Screen (click image for a larger view)

Control Chart, Nexview Mx Analysis and Control Software

Control Chart (click image for a larger view)

ZYGO's Mx™ software powers complete system control & data analysis, including interactive 3D maps, quantitative topography data, intuitive navigation, & built-in SPC with statistics, control charting, and pass/fail limits.

Complete Analysis & Control Software

Mx is ZYGO's software platform for instrument control and data analysis. Running on a latest-generation CPU, and using a simple workflow based concept, users easily navigate the metrology experience from setup through analysis and reporting.

Interactive and detailed data plots show full area data in 2D or 3D; profile slices, material ratio, slope analysis, and PSD views are also standard capability. With built-in SPC, pass/fail indication, data reporting and run charts, production quality analysis is simple.

Mx Highlights:

Robust measurements – New technology reveals topography data nearly everywhere there is a part, even on rough and angled surfaces.

Interactive 3D plots – zoom, pan, rotate, and update results in real time.

Flexible Analyses – a wide array of quantitative results, data views, and filters are included.

Intuitive user interface with a workflow-based design makes it easy to learn and use.

Built in SPC analysis tools track results, monitor pass-fail criteria, and track process statistics.

Automated Operation

The Nexview profiler is a fly-by-wire tool with no manual controls, so it can be fully automated with programmed sequences to measure multiple part segments, recipe based in-tray part measurements, or wide-area part stitching of larger surfaces into a single measurement. User-level logins and recipe configurations provide confidence that an established metrology routine cannot be inadvertently altered.

Other Applications

To accomodate specialized measurement applications, you may obtain optional software licenses for applications such as vision analysis and transparent films analysis. Mx software modules allow ZYGO surface profilers to be used for a wider variety of measurement applications such as materials characterization, precision machining, prosthetics, MEMS, semiconductor, consumer electro-optics, and optical surface manufacturing.

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Use the form below to get more information, request a demonstration of ZYGO optical profilers, or to arrange to send us your samples for a free analysis.

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