Optical Profilers & Profilometers

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Optical Surface Profilers ZeGage™ ZeGage™ Plus NewView™ 9000  New! Nexview™NX2  New! Nomad™ Compass™ APM650™ Mx™ Software Profiler Objectives

Optical Profiler Basics Surface Roughness Measurement Surface Profiling 3D Optical Microscopy 3D Interference Microscopy

Optical Profilers Choose the right optical profiler for your surface metrology application

Optical Profiler Measurement of Machining Marks
Optical Profiler Measurement of Machining Marks

Optical Profilers (profilometers) from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D optical profiling of surface features. All ZYGO optical profilers include proprietary analysis and control software. Choosing the right profilometer system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.

ZeGage Optical Profiler ZeGage Plus Optical Profiler NewView 8000 Optical Profiler Nexview Optical Profiler Nomad Portable Optical Profiler
Model: ZeGage
Optical Profiler
ZeGage Plus
Optical Profiler
NewView 8000
Optical Profiler
Optical Profiler
Optical Profiler
Configuration: Benchtop Workstation Portable
Core Technology: CSI* CSI & PSI* CSI*
STR: 3.5 nm 0.15 nm 0.12 nm 0.08 nm 0.12 nm
Vert. Scan Speed: ≤ 35 μm/s ≤ 73 μm/s ≤ 96 μm/s ≤ 15 μm/s
Max. Step Height: ≤ 20 mm ≤ 95 µm
System Zoom: Fixed Automated Fixed
Z Stage: Automated Motorized
X/Y Stage: Manual or Automated (optional) Automated N/A
Field of View: ≤ 9 mm ≤ 16 mm ≤ 12 mm
Software: Mx
Notes:  STR (Surface Topography Repeatability) is a quantification of instrument capability, per ISO 25178-604.  STR can be improved by filtering and/or measurement averaging.
* CSI = Coherence Scanning Interferometry
   PSI = Phase Shifting Interferometry

Specialty Models

Micro lenses and molds, spherical and aspherical
Compass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO's Compass™ system provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points.

Packaging Metrology System for Panel-Based PCB's
APM650™ – The APM650™ packaging metrology system provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.

Profiler Objectives

Objectives for ZYGO Optical Profilers
Optical profiler objectives, mounted on a turret
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing. All ZYGO objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to ZYGO.

ZYGO also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.

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Brochures Spec Sheets Technical Papers

Contact ZYGO today to learn more about Optical Profilers!

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