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ZeGage™ Plus 3D Optical Surface Profiler with Sub-Nanometer Precision
Mx Software Screen (click image for a larger view)
More than 20X better surface topography repeatability over standard ZeGage.
Up to 2X faster vertical scan rate over standard ZeGage.
Measures virtually all surfaces from rough to super-smooth.
Vibration-resistant, for production floor metrology and process control.
The ZeGage Plus optical profiler expands on the capabilities of the ZeGage profiler with higher precision, faster measurement speed, and an increased range of measurable surfaces – while preserving its ease of use, vibration insensitivity, and small footprint.
The ZeGage Plus profiler can measure a wider variety of surfaces – ranging from very rough to super smooth, with sub-nanometer precision, independent of field of view. Surface finishes may include ground, honed, lapped, polished, and super-polished on materials such as glass, ceramic, and metal.
For high-speed form measurements, the ZeGage Plus scans up to twice as fast as the ZeGage, providing faster time-to-data and increased throughput for production metrology.
As with the ZeGage profiler, the interactive control software, Mx™, provides easy and detailed visualization to help you control your process. Read more to see how the power, versatility, and value of the ZeGage Plus profiler can benefit you.
Productivity and Value
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Contact ZYGO today to learn more about the ZeGage™ Plus Optical Profiler!