|Metrology Systems 3D Optical Profilers Laser Interferometers Nano-Position Sensors Custom Metrology Solutions||
Technical PapersThis page provides a list of Technical Papers and articles written by ZYGO scientists and engineers, grouped by type of product. All Technical Papers are provided as PDF documents. Articles are generally provided as links to the article on the publisher's web site.
Many papers and/or articles are relevant to more than one type of product, and therefore may appear in more than one of the categories listed below.
Advanced Metrology for Energy Efficiency 3D Optical Profilers Are Enabling Reliable Engine Lightweighting Does interferometry work? A critical look at the foundations of interferometric surface topography measurement Optical measurement of ground cylinder lead angle A review of selected topics in interferometric optical metrology Show All 25 Items
Advanced Metrology for Energy Efficiency 3D Optical Profilers Are Enabling Reliable Engine Lightweighting Optical measurement of ground cylinder lead angle Long-term stability of the wavelength method of height scale calibration for interference microscopy Surface-height measurement noise in interference microscopy Show All 66 Items
Does interferometry work? A critical look at the foundations of interferometric surface topography measurement A review of selected topics in interferometric optical metrology Applications of optical coherence in interferometric metrology Characterizing the resolving power of laser Fizeau interferometers Optical metrology for immersive display components and subsystems Show All 54 Items
A Technique to Control Global Figure Using Acid Immersion and Zernike Decomposition Modern Optics Drawings: The journey from MIL to ANSI to ISO drawing formats Translating from American MIL drawings to ISO 10110 (Poster) Coating High Quality Custom Optics: Risk Reduction Through Supplier Evaluation Selecting A Sapphire Window Manufacturer For High-Reliability ISR Applications: 6 Important Criteria Show All 17 Items
Semiconductor Wafer Metrology
Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures Transparent film profiling and analysis by interference microscopy Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry Show All 7 Items
Flat Panel Display Metrology
Transparent film profiling and analysis by interference microscopy Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry Generating fringe-free images from phase-shifted interferometry data Signal modeling for low-coherence height-scanning interference microscopy Show All 14 Items
Stage Position Metrology
In situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array Encoders graduating to extreme precision Real-time feedback for x-ray adaptive optics with an interferometric absolute distance sensor array Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders Advances in optical metrology Show All 15 Items
Aspheric Form Metrology
Optical form and relational metrology of aspheric micro optics Lessons learned from the optical metrology of molded aspheres for cell phone cameras Challenges and solutions in the optical measurement of aspheres Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces (Munich 2009) Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces (Rochester 2007) Show All 7 Items
Optical metrology for immersive display components and subsystems 4 Big Mistakes in Developing Photonics-Enabled Medical Devices Application of precision diamond machining to the manufacture of microphotonics components Interferometer design for writing Bragg gratings in optical fibers Long-term performance of the DUV optical metrology tool for the 90-nm node Show All 13 Items
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