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Technical PapersThis page provides a list of all available Technical Papers and articles written by ZYGO scientists and engineers, grouped by type of product. All Technical Papers are provided as PDF documents. Articles are generally provided as links to the article on the publisher's web site.
Many papers and/or articles are relevant to more than one type of product, and therefore may appear in more than one of the categories listed below.
Long-term stability of the wavelength method of height scale calibration for interference microscopy Realistic optical drawing specifications from a metrology point of view A Technique to Control Global Figure Using Acid Immersion and Zernike Decomposition Surface-height measurement noise in interference microscopy Infidelity and the calibration of surface topography measuring instruments Show All 8 Items
Long-term stability of the wavelength method of height scale calibration for interference microscopy Surface-height measurement noise in interference microscopy Infidelity and the calibration of surface topography measuring instruments Determination of the lateral resolution for an interference microscope using a micro-scale sphere True-color 3D surface metrology for additive manufacturing using interference microscopy Show All 63 Items
Limits to Resolution in Optical Dimension Metrology Axial alignment for high-precision interferometric measurements of steeply-curved spheres Advances in optical metrology The standards rash - is there a cure? Interferometry, Measuring with Light Show All 43 Items
Realistic optical drawing specifications from a metrology point of view A Technique to Control Global Figure Using Acid Immersion and Zernike Decomposition Modern Optics Drawings: The journey from MIL to ANSI to ISO drawing formats Translating from American MIL drawings to ISO 10110 (Poster) Coating High Quality Custom Optics: Risk Reduction Through Supplier Evaluation Show All 17 Items
Semiconductor Wafer Metrology
Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures Transparent film profiling and analysis by interference microscopy Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry Show All 7 Items
Flat Panel Display Metrology
Transparent film profiling and analysis by interference microscopy Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry Generating fringe-free images from phase-shifted interferometry data Signal modeling for low-coherence height-scanning interference microscopy Show All 14 Items
Stage Position Metrology
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders Advances in optical metrology Interferometry, Measuring with Light Revelations in the art of fringe counting: The state of the art in distance measuring interferometry Displacement Measuring Interferometry (book chapter) Show All 12 Items
Aspheric Form Metrology
Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces (Munich 2009) Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces (Rochester 2007) Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces Asphere interferometry powers precision lens manufacturing
4 Big Mistakes in Developing Photonics-Enabled Medical Devices Application of precision diamond machining to the manufacture of microphotonics components Interferometer design for writing Bragg gratings in optical fibers Long-term performance of the DUV optical metrology tool for the 90-nm node DUV optical metrology for the 90-nm node, CD linearity, contacts, and corner rounding Show All 12 Items
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