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Technical PapersThis page provides a list of all available Technical Papers and articles written by ZYGO scientists and engineers, grouped by type of product. All Technical Papers are provided as PDF documents. Articles are generally provided as links to the article on the publisher's web site.
Many papers and/or articles are relevant to more than one type of product, and therefore may appear in more than one of the categories listed below.
Limits to Resolution in Optical Dimension Metrology Advances in optical metrology A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system Revelations in the art of fringe counting: The state of the art in distance measuring interferometry High-accuracy short-range displacement metrology Show All 7 Items
Applications of model-based transparent surface films analysis using coherence scanning interferometry Limits to Resolution in Optical Dimension Metrology Using Coherence Scanning Interferometry to Measure High-Slope Parts Using Coherence Scanning Interferometry for Model-based Transparent Surface Films Analysis Measuring the Form of Highly Sloped Surfaces using Optical Profiling Show All 57 Items
Limits to Resolution in Optical Dimension Metrology Axial alignment for high-precision interferometric measurements of steeply-curved spheres Advances in optical metrology The standards rash - is there a cure? Interferometry, Measuring with Light Show All 43 Items
Coating High Quality Custom Optics: Risk Reduction Through Supplier Evaluation Selecting A Sapphire Window Manufacturer For High-Reliability ISR Applications: 6 Important Criteria 4 Big Mistakes in Developing Photonics-Enabled Medical Devices Projection Optics for Extreme Ultraviolet Lithography (EUVL) Micro-field Exposure Tools (METs) with a Numerical Aperture of 0.5 Recent advances in high-performance window fabrication Show All 13 Items
Semiconductor Wafer Metrology
Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures Transparent film profiling and analysis by interference microscopy Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry Show All 7 Items
Flat Panel Display Metrology
Transparent film profiling and analysis by interference microscopy Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry Generating fringe-free images from phase-shifted interferometry data Signal modeling for low-coherence height-scanning interference microscopy Show All 14 Items
Stage Position Metrology
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders Advances in optical metrology Interferometry, Measuring with Light Revelations in the art of fringe counting: The state of the art in distance measuring interferometry Displacement Measuring Interferometry (book chapter) Show All 12 Items
Aspheric Form Metrology
Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces (Munich 2009) Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces (Rochester 2007) Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces Asphere interferometry powers precision lens manufacturing
4 Big Mistakes in Developing Photonics-Enabled Medical Devices Application of precision diamond machining to the manufacture of microphotonics components Interferometer design for writing Bragg gratings in optical fibers Long-term performance of the DUV optical metrology tool for the 90-nm node DUV optical metrology for the 90-nm node, CD linearity, contacts, and corner rounding Show All 12 Items