Optics Business Segment
Optical Components Group
Markets & Applications
Optical Components Group Aspheres Extreme Precision Optics Super Finishing Optical Windows High Fluence Products Transmission Spheres & Flats Precision Reference Surfaces Optical Mirrors Corner Cube Retroreflectors High Precision Prisms Spherical Optics Thin Plate Optics Glass & Ceramic Machining Semiconductor Stage Components Coatings High-Precision Optical Windows
Extreme Precision OpticsIn the field of extreme precision optics, ZYGO fabricates world-class aspheric and spherical surfaces, precision machined structures, and ultra-high precision optical assemblies, serving primarily the Defense & Aerospace, Life Sciences, and Semiconductor markets.
Our extreme precision optics team has over 20 engineers with a distinguished heritage. Their project experiences range from aspherical optics used to repair the Hubble Space Telescope, to the development of sub-nanometer precision EUV optics used in today's most demanding lithographic systems. Whether you need us to develop a Scope of Work, build a prototype system, or redesign for improved performance, ZYGO is ready to take on your most demanding optical challenges.
Aspheric Surface Fabrication
• Sizes to 500 mm
• Materials: Zerodur, ULE, Glass, Ceramics, Si, CaF2
• Accuracy to λ/5000 RMS @ 633 nm
• Off-axis mirrors without parent fabrication
Computer Controlled Optical Surfacing
• Aspheres & precision sphere, flats, cylinders
• Can achieve:
• Configurable for glass, CaF2, Zerodur, ULE, SiC, Si, other materials and a wide range of part geometries
• Scalable for optics beyond 1.5 meters
• Employs proprietary Computer Controlled Optical Surfacing (CCOS) technology
Super Finishing / Super PolishingSuper Finishing of surfaces is often required for applications where it is critical to reduce the scattering of light as it passes through the surface of an optic. ZYGO's Super Finishing (also known as Super Polishing) process produces extremely smooth surfaces over a wide power spectral density (PSD) band on materials such as fused silica, sapphire, YAG, etc. Our unique process is capable of producing a surface roughness of < 1 Angstrom (< 0.1 nm), over spatial periods ranging from 10 nm to 1 mm.
Ion Beam Figuring (IBF)flat optical surfaces. Data from optical metrology is coupled with CCOS software to locally correct surface errors.
IBF offers significant advantages:
• Achieves surface figure of less than 0.25 nm RMS (λ