ZERODUR® Optical Mirrors

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ZERODUR® Mirrors

ZERODUR Machined Optical Structure
ZERODUR® Machined Optical Structure

ZYGO can custom manufacture precision ZERODUR® mirrors to your exact specifications.

Mirrors made from ZERODUR® feature ultra-low thermal expansion, throughout their total volume, over a wide range of temperatures, and is therefore well suited for applications where very low thermal expansion is critical.

ZERODUR® is an inorganic, non-porous Lithium Aluminum Silicon oxide glass ceramic, characterized by evenly-distributed nano-crystals within a residual glass phase. It has a very low level of inclusions, striae and internal stress, and has excellent chemical stability.

The unique properties of ZERODUR® enables ZYGO to manufacture precision mirrors and other optical components in a variety of geometries, including complex machined optical structures, with very high precision.

Types

ZYGO produces a variety of types high quality custom optical mirrors, including:

• Aspheric mirrors

• EUV Mirrors

Flat mirrors

Light-Weighted Mirrors

• Monolithic Mirrors

Off-axis mirrors

• Parabolic mirrors

• Spherical mirrors

Materials

ZYGO has the capability to process a wide range of materials for optical mirrors. Our product capabilities include:


Applications

ZYGO has a long tradition of manufacturing custom-made optical mirrors for a wide variety of applications, including, but not limited to:

EUV mirrors

• Lightweighted mirrors

• Space mirrors

Stage Components for lithographic steppers

• X-ray mirrors

Defense/Aerospace

Medical/Life Sciences

Industrial OEM

• Intelligence, surveillance & reconnaissance
(ISR)

In addition to ZERODUR® mirrors, ZYGO has a wide range of optical manufacturing capabilities, such as:

• Multi-axis CNC machining & Single-Point Diamond Turning (SPDT)

• A large installed base of very large full aperture polishing process including many multi-meter class polishers

• Extensive experience in key sub-aperture finishing processes such as Computer Controlled Optical Surfacing (CCOS), Ion Beam Finishing (IBF) and Magneto-Rheological Finishing (MRF), through a variety of commercially available and custom made equipment

• Large coating capabilities and capacity

• Extensive cleaning (included automated) and inspection stations

• A wide range of metrology capabilities to characterize components across their entire Power-Spectral Density, with interferometers as large as 32" in diameter, and a wide range of state-of-the-art custom-made equipment.

Inquiry/Quote Form – Optical Mirrors
Please use the form below to tell us about the ZERODUR® mirror you need, or ask questions about any of ZYGO's optical products, services, or capabilities. You may send any additional information, including specifications and/or prints, to:

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