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Semiconductor

Semiconductor Applications

• DUV – VIS objectives

• Illumination systems

• Beam expanders

• Projection lenses

• High precision reference mirrors

• Monolithic glass stage components

• Polarizers

• Thin plate fused silica optics

• Waveplates

ZYGO's Optics business segment has a long, rich history in supplying the semiconductor industry with high precision optical components and optical assemblies.

Our Tier 1 optical fabrication facility in Connecticut incorporates proprietary manufacturing and metrology technologies to produce high precision optical components used in many semiconductor applications including lithography (stage components and reference mirrors, inspection, memory repair, and more.

Our Electro-Optics Group focuses on high precision, complex optical assemblies incorporating a variety of materials including CaF2 and fused silica.

ZYGO's Optics business segment also benefits greatly from its close relationship with the Metrology business segment when customized metrology solutions are required to optimize assembly time in production or quantify performance on a completed product.

From precision reference surfaces to deep UV objectives to maskless projection lenses, ZYGO's Optics business segment can help you achieve your performance goals.

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