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Metrology Systems 3D Optical Profilers Laser Interferometers Nano-Position Sensors Custom Metrology Solutions

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Product Manuals 3D Optical Profilers Laser Interferometers MetroPro® & Mx™ Position Metrology Systems


Product Manuals

All manuals are in PDF format, which requires Adobe Acrobat Reader software for viewing. Click here to download this free software.

Authentication Required - A username and password are required to download manuals. If you are an existing ZYGO customer, you may request that this information be e-mailed to you. If you would like to download a manual prior to purchasing a ZYGO product, your local Sales/Service Office will be happy to assist you.

3D Optical Profilers
Manuals for NewView™, Nexview™, ZeGage™, ZeGage™ Plus, Nomad™, and ZeMapper™ optical profiler products, various measurement applications, and more.
Laser Interferometers
Manuals for ZYGO interferometer products, including: GPI™ xp, GPI™ LC/ST, PTI250™, Verifire™, DynaFiz®, Mini™, and Mini™ XP, aperture converters, radius scales, various measurement applications, and more.
MetroPro® and Mx™
Manuals for ZYGO MetroPro™ and Mx™ software, including: getting started guide, reference guide, MetroScript Programming Guide, and more.
Position Metrology Systems
Manuals for distance measuring interferometer products, including: ZMI™ 500, ZMI™ 2000, ZMI™ 4000, laser heads, interferometers, measurement boards, cables, components, and more.
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