Large-Aperture Downward-Looking Interferometer
Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing.
The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space.
Stand-alone large aperture workstation for measuring plano optical surface form up to 12 inches (300 mm) in diameter such as mirrors, windows, semiconductor wafers, wafer chucks and blocked flats.
- 12" (300 mm) aperture in downward-looking orientation for easy part handling and alignment
- Turnkey, self-contained system including interferometer mainframe, passive vibration isolation system, test part alignment stage and 1/15th wave PVr transmission flat (TF)
- Compact footprint minimizes consumption of valuable floor space
- Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments