Interferometers

ZMI™ Series – Displacement Measuring Interferometers

ZYGO’s standard interferometer configurations support many types of measurement scenarios. Most interferometers can support a straight-through or right-angle measurement orientation and can be manufactured for operation in vacuum.

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Linear Interferometers

This unit measures retroreflector targets for tracking objects moving primarily in one linear dimension or rotating about a fixed point. ZYGO offers a standard and compact size linear interferometer to accommodate different system space constraints. Examples: Reticle stages, gantry systems, steering mirrors

Plane Mirror Interferometers

This unit measures plane mirror targets for tracking objects moving in multiple linear dimensions with limited rotations. ZYGO’s plane mirror interferometers are designed for high stability to mitigate thermal error. Examples: Wafer stages, stacked stage systems

Wavelength Compensator

This unit measures changes in the index of refraction for use in compensating other measurement axes. ZYGO’s Compact Wavelength Compensator provides high precision feedback of index change for best performance of displacement measurement in ambient conditions.

 

Accessories

Complete the measurement system by routing the beam from the laser to the interferometers and ultimately to the measurement electronics. ZYGO offers a variety of standard fold mirrors, beamsplitters, fiber optic pickups, and fiber cables for flexible configuration of your measurement system.

ZMI Accessories

Custom Interferometer Designs

ZYGO specializes in custom multi-axis interferometer designs for OEM applications. Custom designs allow for consolidated beam delivery for applications where space is at a premium. It also reduces the amount of time required to align the system allowing for faster integration during production.

Custom Multi-Axis Interferometer
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Service Brochure
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Nano-Position Sensors
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ZMI Beam Reducing Telescope
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ZMI Beamsplitters 10% 33% 50% 75%
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ZMI Column Reference Interferometer (CRI), Vacuum Compatible
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ZMI Compact 3 Axis HSPMI
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ZMI Differential Plane Mirror Interferometer (DPMI)
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ZMI Fiber Optics Pickup 9mm
Title
Document
Download
Service Brochure
DocumentBrochure
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Nano-Position Sensors
DocumentBrochure
Download Download
ZMI Beam Reducing Telescope
DocumentSpecifications
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ZMI Beamsplitters 10% 33% 50% 75%
DocumentSpecifications
Download Download
ZMI Column Reference Interferometer (CRI), Vacuum Compatible
DocumentSpecifications
Download Download
ZMI Compact 3 Axis HSPMI
DocumentSpecifications
Download Download
ZMI Differential Plane Mirror Interferometer (DPMI)
DocumentSpecifications
Download Download
ZMI Fiber Optics Pickup 9mm
DocumentSpecifications
Download Download
ZMI Fiber Optics Pickup 9mm SS
DocumentSpecifications
Download Download
ZMI Fold Mirror
DocumentSpecifications
Download Download
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ZMI™ 501A Displacement Measuring Interferometer System
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ZMI™ Cable Guide
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ZMI™ Compact Wavelength Compensator Accessory
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ZMI™ Differential Plane Mirror Interferometer
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ZMI™ Optics Guide
Title
Document
Download
ZMI™ 501A Displacement Measuring Interferometer System
DocumentOMP-0532B
Download Download
ZMI™ Cable Guide
DocumentOMP-0333R
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ZMI™ Compact Wavelength Compensator Accessory
DocumentOMP-0415F
Download Download
ZMI™ Differential Plane Mirror Interferometer
DocumentOMP-0223E
Download Download
ZMI™ Optics Guide
DocumentOMP-0326AA
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