Measurement Electronics

ZMI™ Series – Displacement Measuring Interferometers

ZMI Measurement Electronics Board

ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.

The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.

The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.

For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates  common non-linear errors intrinsic in DMI systems.

  • MORE INFO
  • BROCHURES &
    SPEC SHEETS
  • MANUALS
  • TECH PAPERS
Model: 501A 2400 4004 4104(C)
Number of Axes/Board: 2 1 or 2 4
Board Type: Enclosure 6U VME 6U VME64x
Minimum Optical Power: 8.0 µW 1.9 µW 1.0 µW 0.07 µW
Position Resolution: 1.24 nm 0.31 nm 0.15 nm
Max. Velocity: ±0.475 m/s ±2.1 m/s ±2.55 m/s
Accuracy at Max Velocity (σ): 1.6 nm 0.5 nm 0.2 nm
Cyclic Error Compensation: No Yes
Compatible Laser(s): 7705 7702, 7714, and 7724
  Note: Specifications are for double-pass interferometers.
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Nano-Position Sensors
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ZMI 2400 Measurement Board
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ZMI 4004 Measurement Board
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ZMI 4104 Measurement Board
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ZMI 501A Enclosure
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Nano-Position Sensors
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ZMI 2400 Measurement Board
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ZMI 4004 Measurement Board
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ZMI 4104 Measurement Board
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ZMI 501A Enclosure
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