Photolithography Stages

ZMI Stage Position Measurement SystemWith over 30 years of experience, ZYGO's nano-position sensing products have become one of the most trusted, delivering continuous operation with exceptional performance. ZYGO is a market leader in displacement sensors providing feedback for closed loop servo control on an OEM basis. Semiconductor and flat panel manufacturing and process control tools in production today rely on ZYGO sensors to provide the precision and reliability needed for high volume manufacturing environments.

Our ZMI™ displacement position sensors are used to measure relative motion of reticle/mask and wafer stages in these systems to the nanometer level. Our modularized components can be configured to provide all degrees of freedom necessary for your specific application to enable successful nanometer-level motion control. A single ZMI laser head is capable of measuring between 2 and 22 axes of measurement, allowing for a fully synchronous measurement across all axes.

As your partner in motion control, you can expect ZYGO to be there to support your continuous system improvements and provide a path forward towards your next-generation requirements. 

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