Patent Information for ZYGO Products


Optical
Profilers

5,784,164
6,597,460
6,775,006
6,822,745
6,989,905
7,061,623
7,068,376
7,142,311
7,177,029
7,298,494
7,321,431
7,324,210
7,428,057
7,446,882
7,456,975
7,468,799
7,522,288
7,586,620
7,616,323
7,889,355
7,933,025
7,948,637
7,952,724
8,045,175
8,107,085
8,698,891
8,780,334
9,025,162
9,599,534
9,658,129
9,798,130


Laser
Interferometers

6,359,692
6,643,024
6,781,700
6,804,011
6,879,402
6,882,432
6,924,898
6,972,849
6,995,848
7,218,403
7,612,893
7,710,580
7,796,273
7,796,275
7,948,638
7,948,639
8,045,175
9,103,649

Displacement Position Sensors

5,767,972
5,917,844
5,970,077
6,157,660
6,452,682
6,597,459
6,950,192
6,975,406
7,428,685
7,542,147
7,576,868
7,636,166
7,639,367
7,697,195
7,826,064
8,300,233
8,670,127
8,885,172
8,913,226
9,115,975
9,146,093

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