Research Papers

The Zygo research team is committed to publishing their latest research in the scientific and optical metrology communities.

Filtered By

Research Paper

Contributions of holography to the advancement of interferometric measurements of surface topography

This paper reviews seven specific developments, ranging from data acquisition to fundamental imaging theory in three dimensions, that illustrate the synergistic developments of holography and interferometry.

Mar 2, 2022

Research Paper

Revolutions in optical metrology in the era of Big Data and Industry 4.0

In this presentation, we discuss some of the opportunities and challenges for optical metrology in the context of industry 4.0.

Feb 1, 2022

Research Paper

Laser damage properties of Al2O3/MgF2 antireflection coatings on large curved substrates at 248 nm

This paper presents the results of one such effort to coat multi-layered Al2O3 and MgF2 antireflection coatings on substrates of planar, spherical, and aspherical geometries. The spectral, surface quality, and pulsed laser damage performance of these coatings are presented.

Jan 25, 2022

Research Paper

Contributions of holography to the advancement of interferometric measurements of surface topography

This paper presents many contributions of holography to the advancement of interferometry for surface topography measurement.

Jan 1, 2022

Research Paper

Advances in flexible precision aspheric form measurement using axially scanned interferometry

The advances in flexible, precision aspheric form measurement using axially scanned interferometry Zygo’s Verifire™ Asphere (VFA) measuring instrument relies on translating the test part along the optical axis of a laser Fizeau interferometer while collecting interference fringes from areas of low slope relative to a spherical reference surface.

Oct 18, 2021

Research Paper

Fourier Optics Modelling of Instrument Response for Interference Microscopy

The response of an interferometer to variations in surface height depends on the filtering properties of the imaging system. Here we provide a simple and practical model of an imaging interferometer using classical Fourier optics, including the effects of partial coherence.

Aug 21, 2021

Research Paper

Fourier optics modelling of coherence scanning interferometers

We propose an instrument model for coherence scanning interferometry using familiar Fourier optics methods, the spectrum of plane waves, and the assumption that the light source spectral bandwidth is the dominant factor in determining fringe contrast as a function of optical path length.

Aug 5, 2021

Research Paper

The state of the art in swept-wavelength laser Fizeau interferometry

Here we review the principles and current state of the art for swept-wavelength interferometry for optical testing, including recent advances in digital holographic refocusing and environmental robustness using model-based data analysis.

Aug 1, 2021

Research Paper

Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer

This article discusses a new instrument for measurements of thin transparent flats incorporates a novel in-line normal-incidence equal path interferometer, and extended broad-band illumination to isolate the surface of interest while reducing coherent noise and artifacts.

Jul 14, 2021

Research Paper

Instantaneous measurement Fizeau interferometer with high spatial resolution

This article reports on a Fizeau-type interferometer optimized for light-efficient, single-frame carrier fringe acquisition for instantaneous metrology at high lateral resolution.

Jul 14, 2021

Research Paper

Challenges and solutions in the optical measurement of aspheres

This paper explores how advances in digital signal processing are driving a convergence of the two techniques.

Jul 14, 2021

Research Paper

Interference Microscopy for Surface Structure Analysis

This chapter considers the principles of interferometric dimensional metrology applied to surface features best viewed in a microscope. Interference microscopy encompasses a wide variety of techniques for measuring surface texture, shape, step heights, lateral positions and dimensions, transparent film structure, and the scattering behavior of optically unresolved patterns.

Jul 14, 2021