Abstract

Pupil-Plane Scanning White-Light Interferometry measures reflectivity as a function of angle of incidence, wavelength and polarization in one location of an object surface. This information is converted into ellipsometric information and allows the characterization of material optical properties and layer thickness in the case of layered structures. We illustrate the capability of the method by measuring the thickness and refractive index of thin film standards. The information is also used to create accurate 3D topography maps of complex object structures.