Abstract


In this presentation, we demonstrate an instrument designed for the metrology of micro aspheric lenses to address the metrology challenges posed by small freeform components. The instrument integrates Coherence Scanning Interference microscopy with 6-axis staging for sample positioning. This platform provides high-resolution 3D topography subaperture maps over the entire surface of diamond-turned molds and finished molded lenses, and combines these into a full surface 3D representation. Innovative solutions for handling complex surface prescriptions, non-uniform data distributions, irregular apertures and low degrees of symmetry have been developed.