Abstract

As 248nm DUV lithography tools pursue resolution of smaller features, the transition towards higher numerical aperture optics in these tools is pushing the development of high-performance anti-reflection coatings on large-area, highly curved transmitting optics present in these systems. We present the results of one such effort to coat multi-layered Al2O3 and MgF2 antireflection coatings on substrates of planar, spherical, and aspherical geometries. The spectral, surface quality, and pulsed laser damage performance of these coatings are presented.