Abstract

For optical measurements of areal surface topography, the instrument transfer function (ITF) quantifies height response as a function of the lateral spatial frequency content of the surface. The ITF is used widely for optical full-field instruments such as Fizeau interferometers, confocal microscopes, interference microscopes, and fringe projection systems as a more complete way to characterize lateral resolving power than a single number such as the Abbe limit. This paper is a comprehensive review of the ITF, including standardized definitions, ITF prediction using theoretical simulations, common uses, limitations, and evaluation techniques using material measures.