Research Papers

The Zygo research team is committed to publishing their latest research in the scientific and optical metrology communities.

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Research Paper
Interference Microscopy for Surface Structure Analysis

Interference Microscopy for Surface Structure Analysis

This chapter considers the principles of interferometric dimensional metrology applied to surface features best viewed in a microscope. Interference microscopy encompasses a wide variety of techniques for measuring surface texture, shape, step heights, lateral positions and dimensions, transparent film structure, and the scattering behavior of optically unresolved patterns.

Jul 14, 2021

Research Paper

INTERFEROMETRY: Asphere interferometry powers precision lens manufacturing

A large-aperture, low-uncertainty laser Fizeau interferometer with highly expanded dynamic range enables accurate qualification of high-performance aspheric optics.

Jul 14, 2021

Research Paper

Short Range, High Accuracy Displacement Metrology

This article provides a brief overview of precision measurements of sub-mm displacements and compares the relevant performance characteristics and limitations.

Jul 14, 2021

Research Paper

Freeform Metrology for Consumer Electronics Applications

In this presentation, we demonstrate an instrument designed for the metrology of micro aspheric lenses to address the metrology challenges posed by small freeform components.

May 8, 2021

Research Paper

The Instrument Transfer Function For Optical Measurements of Surface Topography

The ITF is used widely for optical full-field instruments such as Fizeau interferometers, confocal microscopes, interference microscopes, and fringe projection systems as a more complete way to characterize lateral resolving power than a single number such as the Abbe limit.

Apr 1, 2021

Research Paper

Elementary Fourier Optics model for interferometric measurements of surface topography

This article discusses how many ZYGO metrology instruments rely on interferometry combined with imaging systems to measure surface form, waviness, and roughness. Although these instruments have advanced software that performs data interpretation for you, it can be helpful to understand how the imaging process influences interferometric measurements at a fundamental level

Oct 1, 2020

Research Paper

Solutions for environmentally robust interferometric optical testing

In the past, the environmental sensitivity of PSI relegated its use to dedicated metrology labs with well-controlled environments. As metrology requirements have expanded beyond the lab, advances in metrology techniques now enable high-precision optical testing in places previously considered inappropriate for interferometric techniques In the past, the environmental sensitivity of PSI relegated its use to dedicated metrology labs with well-controlled environments.

Aug 20, 2020

Research Paper

Definition and Evaluation of Topography Measurement Noise in Optical Instruments

We clarify the definition and experimental methods for quantifying random noise in areal surface topography measurements.

Jun 27, 2020

Research Paper

Fourier Optics Modeling of Interference Microscopes

We propose a practical theoretical model of an interference microscope that includes the imaging properties of optical systems with partially coherent illumination.

Apr 30, 2020

Research Paper

Optical Topography Measurement of Steeply-Sloped Surfaces Beyond the Specular Numerical Aperture Limit

Here we present results demonstrating the capability of a commercial coherence scanning interferometer for measuring surface topography of a roughened flat and a blazed grating with tilt angles greater than the NA slope limit. We show that the surface form, i.e. the tilted plane, can be measured correctly.

Apr 1, 2020

Research Paper

3D optical profilers are enabling reliable engine lightweighting

This article discusses the significant role that 3D optical profilers can play in facilitating the manufacture of lightweighted engine components.

Jan 2, 2020

Research Paper

Controlling an active bimorph deformable mirror with sub-nanometre resolution

In this paper, we show that the active optical surface of a bimorph mirror (from Thales-SESO) can be accurately changed with sub-nanometre height sensitivity by dynamically monitoring the mirror’s surface using an array of high-speed (up to 200 kHz) Zygo ZPS™ absolute interferometric displacement sensors mounted in an independent metrology frame.

Sep 9, 2019