Research Papers

The Zygo research team is committed to publishing their latest research in the scientific and optical metrology communities.

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Research Paper
Interference Microscopy for Surface Structure Analysis

Does Interferometry Work? A Critical Look at the Foundations of Interferometric Surface Topography Measurement

We review the fundamentals of imaging interferometry and describe ways of defining instrument response, including the linear instrument transfer function. These considerations define practical regimes of linear behavior that are usually satisfied for traditional uses of interferometers; but that are increasingly challenged by applications involving complex textures and high surface slopes.

Sep 3, 2019

Research Paper

How To Measure Thin, Parallel Optics

In this paper, the authors showcase how the right metrology equipment makes it possible to distinguish the surfaces and characterize the quality of both in a single measurement, even if they are less than a millimeter thick.

Sep 3, 2019

Research Paper

Long-term stability of the wavelength method of height scale calibration for interference microscopy

Here we summarize results collected over 3 years’ experience from our laboratories to provide statistical support for confirming and refining these uncertainty contributions. We find that the source wavelength stability is < 0.005% RMS and the stability of the height scaling factor (the amplification coefficient) is < 0.02% RMS over 900 days.

Sep 3, 2019

Research Paper

Optical measurement of ground cylinder lead angle

We present our lead angle measurement solution using interference microscopy, multi-axis staging, and advanced software for determining surface texture direction and cylinder rotation axis.

Jun 23, 2019

Research Paper

A review of selected topics in interferometric optical metrology

This review gathers together 15 special topics in modern interferometric metrology representing a sampling of historical, current and future developments.

Apr 23, 2019

Research Paper

Encoders graduating to extreme precision

The article discusses the revolutionary development in optical displacement metrology has been the transition from free-space laser interferometers to extreme-precision optical encoders for positioning measurements in semiconductor photolithography systems.

Apr 1, 2019

Research Paper

Realistic optical drawing specifications from a metrology point of view

This article will look at some widely used optical surface specifications and provide guidance on how to use them properly to minimize the ambiguity between the customer and the supplier.

Jan 1, 2019

Research Paper

A Technique to Control Global Figure Using Acid Immersion and Zernike Decomposition

Introduction of a technique to control the global figure of an optical substrate that leverages the bulk removal efficiency of a full aperture process but has the determinism of a sub aperture figuring approach.

Jan 1, 2019

Research Paper

Advanced metrology for energy efficiency

This article discusses how lightweighting is a priority for automotive OEMs in their quest to adhere to exacting engine efficiency and emission guidelines.

Jan 1, 2019

Research Paper

Infidelity and the calibration of surface topography measuring instruments

This article discusses the ability to measure and characterize surface topography is vital in advanced manufacturing and to many precision engineering applications.

Nov 1, 2018

Research Paper

Determination of the lateral resolution for an interference microscope using a micro-scale sphere

This article will review the lateral resolution of a surface topography measuring instrument refers to the ability to clearly distinguish surface heights between two closely spaced features.

Nov 1, 2018

Research Paper

In situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array

This article reviews how adaptive x-ray mirrors are emerging as one of the primary solutions for meeting the performance needs of the next generation of x-ray light sources.

Sep 21, 2018