Research Papers

The Zygo research team is committed to publishing their latest research in the scientific and optical metrology communities.

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Research Paper

Real-time feedback for x-ray adaptive optics with an interferometric absolute distance sensor array

We demonstrate the performance of an array of interferometric absolute position sensors as a means of providing real-time feedback on shape changes of the reflecting surface of a bimorph mirror by comparison to a Fizeau interferometer.

Sep 18, 2018

Research Paper

Modern optics drawings: the journey from MIL to ANSI to ISO drawing formats

This paper discusses how to interpret a single drawing across traditionally-used standards within the United States. Deconstructing the basics of the three standards mentioned allows designers and fabricators to communicate in a single language.

Sep 14, 2018

Research Paper

Modern optics drawings: translating from American MIL drawings to ISO 10110

This article discusses how effective optics drawings clearly communicate requirements. Increases in the globalization of the optical community have forced the United States to consider transitioning to a single worldwide standard. These changes are reflected in both the optical engineering and fabrication community in learning how to understand a complex standard.

Sep 14, 2018

Research Paper

Applications of optical coherence in interferometric metrology

We discuss cases where high coherence is essential, there can nonetheless be a benefit to synthesizing reduced coherence to suppressing spurious fringes, coherent noise, and unwanted speckle.

Sep 7, 2018

Research Paper

Surface-height measurement noise in interference microscopy

We present results from a commercial phase-shifting interference microscope showing an RMS measurement noise of 0.03 nm for a 1-second data acquisition of 1 million surface topography image points, after application of a 3x3-pixel median filter. The results follow the expected inverse square root dependence on the data acquisition time.

Aug 18, 2018

Research Paper

Characterizing the resolving power of laser Fizeau interferometers

Results here show the ITF for a commercial 100-mm aperture interferometer with spatial frequency response ranging from 0 to 1500 cycles per aperture.

Aug 7, 2018

Research Paper

Optical metrology for immersive display components and subsystems

In this research, we consider the problem of evaluating the parallelism and surface form deformation for stacked assemblies of multiple flat glass substrates.

May 21, 2018

Research Paper

Wave aberration tolerance for the optical design of a laser Fizeau interferometer

This paper concerns a numerical technique for evaluating effect of wave aberration on the frequency response of a laser Fizeau interferometer.

Nov 27, 2017

Research Paper

Optical form and relational metrology of aspheric micro optics

This article discusses the evolution of a new optics in the manufacturing industry dedicated to consumer electronics and compact automotive and medical imaging devices

Oct 1, 2017

Research Paper
Interference Microscopy for Surface Structure Analysis

True-color 3D surface metrology for additive manufacturing using interference microscopy

We present color surface topography measurements from a CSI instrument designed to provide true color images in addition to areal surface topography of additive manufactured samples.

Oct 1, 2017

Research Paper

Special Section Guest Editorial: Interferometry

This guest editorial introduces the Special Section on Interferometry.

Sep 8, 2017

Research Paper

Measurement, certification and use of step-height calibration specimens in optical metrology

Authors provide definitions for the reference and measurement areas of step-height specimens as well as practical measurement protocols for processing the surface topography map.

Jun 26, 2017