Research Papers

The Zygo research team is committed to publishing their latest research in the scientific and optical metrology communities.

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Research Paper

Coherent phase transfer function degradation due to wave aberrations of a laser Fizeau interferometer

This paper concerns a numerical technique and associated modeling results for evaluating coherent phase transfer function (CPTF) degradation that is induced by wave aberrations of the imaging train of a laser Fizeau interferometer.

Jun 21, 2017

Research Paper

Applications of model-based transparent surface films analysis using coherence-scanning interferometry

We discuss how surface metrology must increasingly contend with submicron films, whose prevalence now extends to products well beyond semiconductor devices.

May 22, 2017

Research Paper

Limits to resolution in optical dimensional metrology

This article discusses how characterizing the limits of resolution requires an adjustment in our vocabulary. It would be preferable in specification sheets and technical reports to reserve “resolution” for those metrology attributes that are constrained by our ability to clearly separate neighboring features or surface depths, as in 2D and 3D imaging.

Apr 24, 2017

Research Paper

Measuring High Slope Parts with Coherence Scanning Interferometry

This article discusses how metrology tools usually involve a tradeoff between slope acceptance and measurement speed. As a result, a compromise needs to be made between acceptable throughputs and adequate data coverage, when measuring machined parts with high slopes.

Apr 18, 2017

Research Paper

Using Coherence Scanning Interferometry for Model-based Transparent Surface Films Analysis

Surface metrology has to increasingly deal with the presence of sub-micron thick films, which are now being used on products well beyond semiconductor devices.

Apr 10, 2017

Research Paper

Using Coherence Scanning Interferometry to Measure High-Slope Parts

This article discusses the unsatisfying compromise has to be made between acceptable throughput and sufficient data coverage when measuring high-slope machined parts.

Apr 10, 2017

Research Paper
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Measuring the Form of Highly Sloped Surfaces Using Optical Profiling

This article discusses how the form of highly sloped surfaces has been challenging application for optical profilers using coherence scanning interferometry (CSI).

Mar 22, 2017

Research Paper

Lessons learned from the optical metrology of molded aspheres for cell phone cameras

This article discusses the issues include defects in the mold pins, problems with the flow and distribution of material during injection molding, variations in the location of mechanical features, and defects in aspheric form and smoothness only visible with full 3D non-contact metrology. Our measurement techniques rely on high precision interference microscopy combined with advanced multi-axis staging for both surface form and relational metrology.

Mar 14, 2017

Research Paper

Using the instrument transfer function to evaluate Fizeau interferometer performance

This article discusses advances in test procedures and analysis techniques now enable reliable instrument transfer function measurements to 1000 cycles per aperture independent of several traditional sources of uncertainty and operator error.

Jan 1, 2017

Research Paper

The Meaning and Measure of Vertical Resolution in Optical Surface Topography Measurement

This paper proposes to use internationally standardized terms and definitions for measurement noise and surface topography repeatability as more meaningful quantifiers for measurement performance.

Jan 1, 2017

Research Paper

Coating High Quality Custom Optics: Risk Reduction Through Supplier Evaluation

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Dec 16, 2016

Research Paper

Concepts and geometries for the next generation of precision heterodyne optical encoders

This article discusses the demands of modern precision engineering exemplified by semiconductor photolithography systems have propelled encoder technology to a performance level surpassing that of line-of-site interferometry.

Oct 1, 2016