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Research Paper

Transparent film profiling and analysis by interference microscopy

This article discusses how a white-light interferometer with new signal analysis techniques provides 3D top surface and thickness profiles of transparent films.

Aug 11, 2008

Research Paper

New algorithms and error analysis for sinusoidal phase shifting interferometry

We propose new phase-demodulation algorithms and provide sensitivity analyses to random noise, nonlinearity, vibrations and calibration error to demonstrate that sinusoidal phase shifting can be as robust and computationally efficient as the more established linear phase-shift techniques.

Aug 11, 2008

Research Paper

Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler

This article illustrates the capability of the method by measuring the thickness and refractive index of thin film standards. The information is also used to create accurate 3D topography maps of complex object structures.

Apr 25, 2008

Research Paper

Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling

This article discusses vigorous coupled wave analysis (RCWA) interprets 3D white-light interference microscopy profiles and reveals the dimensions of optically-unresolved surface features.

Mar 10, 2008

Research Paper

Suppressing vibration errors in phase-shifting interferometry

This article reviews a new method for reducing the influence of vibrations in phase-shifting interferometry uses spatial information to achieve a 100X reduction in vibrationally induced surface distortion for small-amplitude vibrations.

Sep 27, 2007

Research Paper
Interference Microscopy for Surface Structure Analysis

Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry

This article discusses the Fourier components of interference signals generated by scanning a high-numerical-aperture objective orthogonal to an object surface correspond to different angles of incidence on the surface.

Jun 15, 2007

Research Paper

ZYGO unveils its high-precision optics capabilities

Jacqueline Hewett speaks to John Stack, the president of ZYGO’s Optical Systems Division, who lifts the lid on what he sees as the best-kept secret in the optics industry.

May 25, 2007

Research Paper

Interferometric measurement of rotationally symmetric aspheric surfaces

This article presents new method for measuring the surface of aspheric optics using a combination of two interferometric technologies.

May 14, 2007

Research Paper

Absolute Measurement of Rotationally Symmetric Aspheric Surfaces

In this article we scan aspheric surfaces along its symmetry axis in a Fizeau cavity with spherical reference surface.

Oct 1, 2006

Research Paper

Stroboscopic white-light interference microscopy

This theoretical study provides detailed graphs of expected errors as a function of the duty cycle, including fringe contrast loss, apparent wavelength shift, and measurement error.

Aug 10, 2006

Research Paper

Fizeau interferometers evaluated using flashphase and phase-shift fringe analysis

This article discusses how interferometers are used in optical metrology, in the semiconductor industry, for military applications, for laser design and fabrication, for the design of astronomy-related optics and in many other academic and industrial fields.

Aug 1, 2006

Research Paper

Fizeau Interferometers Evaluated Using FlashPhase and Phase-Shift Fringe Analysis

In this article, the authors discuss a few traditional methods are used for the analysis of interferometric data.

Aug 1, 2006