Fizeau interferometers evaluated using flashphase and phase-shift fringe analysis

This article discusses how interferometers are used in optical metrology, in the semiconductor industry, for military applications, for laser design and fabrication, for the design of astronomy-related optics and in many other academic and industrial fields.

Aug 1, 2006

Fizeau Interferometers Evaluated Using FlashPhase and Phase-Shift Fringe Analysis

In this article, the authors discuss a few traditional methods are used for the analysis of interferometric data.

Aug 1, 2006

Interpreting interferometric height measurements using the instrument transfer function

This article emphasizes the precariousness of using a linear ITF for what is fundamentally a nonlinear process of encoding height into the phase of a complex wave amplitude.

Dec 1, 2005

Generating fringe-free images from phase-shifted interferometry data

This article discusses weighted averaging of a sequence of phase-shifted interference patterns yields a fringe-free intensity image that can be useful for machine vision, lateral metrology, defect detection, and other supplementary tasks in a surface-profiling interferometer.

Nov 20, 2005

High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics

This article discusses two specially-designed visible-wavelength interferometers meet demanding performance requirements in the mid-spatial frequency regime for current and next generation free-form x-ray and EUV optics.

Aug 31, 2005

Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

This article reports on characterization techniques for microstructures using white-light interference microscopy.

Jan 1, 2005

Spatial Coherence in Interferometry

This paper describes a new light source, called the “Ring of FireTM” (RoF), with a specific spatial coherence function, which greatly reduces the intrinsic instrument noise.

Jan 1, 2005

Signal modeling for low-coherence height-scanning interference microscopy

This article proposes a computationally efficient theoretical model for low-coherence interferometric profilers that measure surface heights by scanning the optical path difference of the interferometer.

Sep 1, 2004

Environmentally friendly interferometry

This article discusses how modern digital imagers and computing platforms eliminate most of the disadvantages typically cited against spatial processing techniques.

Aug 2, 2004

Displacement-measuring interferometers provide precise metrology

Semiconductor lithography has pushed displacement measurement to new limits, resulting in systems that offer high-speed angstrom-level resolution.

Dec 1, 2003

Application of precision diamond machining to the manufacture of microphotonics components

This article discusses convergence of machine technologies developed for both weapons and commercial applications led to modern diamond turning.

Nov 3, 2003

Measurement of hard pellicles for 157-nm lithography using Fourier transform phase-shifting interferometry

This article describes a measurement method called Fourier Transform phase-shifting interferometry (FTPSI) that can overcome the disadvantages of standard PSI by the use of wavelength tuning and special analysis techniques. The technique can measure several surfaces simultaneously without distortion from multiple interference effects and is applied to the measurement of mounted and unmounted pellicles.

Aug 1, 2003