3D Optical Microscopy
Choose the right 3D optical microscope for your surface metrology application
3D optical microscopes (also known as optical profilers) from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D optical microscopy of surface features.
3D optical microscopy utilizes two-beam division of amplitude interferometry to compare the sample surface to a reference surface, and is well suited for surface topography measurement, transparent films analysis, and texture characterization.
Choosing the best optical microscope system for your application depends on your specific requirements, including precision, speed, automation, configuration flexibility, and vertical measurement range.
SIMPLE TO USE,
MEASURE IT RIGHT
ON THE SHOP FLOOR!
PERFORMANCE, FLEXIBILITY, AND
WELL SUITED FOR
A WIDE RANGE OF
MEET YOUR NEEDS!
DESIGNED FOR THE
MEASURE IT ALL –
In addition to the our standard configurations, we have specialty models that apply CSI in a package tailored for specific applications which include:
Compass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO's Compass™ system provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points.
Nomad™ – The Nomad™ portable optical profiler is the ideal solution for measuring surfaces that are too large for the measurement stage of a conventional workstation profiler. As with our other optical profilers, the Nomad portable profiler has sub-nanometer measurement precision that is independent of field magnification.
APM650™ – The APM650™ packaging metrology system provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals.
The wide range of objectives Zygo offers for its optical profilers is unmatched in the industry, and is continually growing. All Zygo objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to Zygo.
Optical profiler objectives, mounted on a turret
Zygo also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.
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