• Non-contact optical measurement
• Repeatable absolute position measurement (≤ 0.5 nm, 3σ)
• High-precision system using proprietary compensation algorithms
• Ultra-compact sensors with no EMI sensitivity or heat generation
• Reliable telecom-proven fiber optic components
• Scalable, up to 64 channels
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.
The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.
The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables. ZYGO's complimentary ZPS™ software provides a plug-and-play connection between the ZPS system and your computer, allowing you to get up and running with your system quickly and easily.
Click on each of the thumbnail images below to see illustrations of sample applications.
Precision Stage Control
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Applications OEM Services Stage Servo Control Adaptive Optics Control
ZPS™ User Interface Software