Optical Surface Profilers

3D Optical Surface Profilers Choose the right Optical Profiler system for your application

Optical profilers from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. All of our optical profilers include proprietary data analysis and system control software. Choosing the right surface measurement system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.


ZeGage Optical Surface Profiler ZeGage Plus Optical Surface Profiler NewView 8000 Optical Surface Profiler Nexview Optical Surface Profiler Nomad Portable Optical Surface Profiler
Model: ZeGage
Optical
Surface Profiler
ZeGage Plus
Optical Surface Profiler
NewView 8000
Optical
Surface Profiler
Nexview
Optical
Surface Profiler
Nomad
Portable Optical
Surface Profiler
Configuration: Benchtop Workstation Portable
Core Technology: CSI* CSI & PSI* CSI*
STR: 3.5 nm 0.15 nm 0.12 nm 0.08 nm 0.12 nm
Vert. Scan Speed: ≤ 35 μm/s ≤ 73 μm/s ≤ 96 μm/s ≤ 15 μm/s
Max. Step Height: ≤ 20 mm ≤ 95 µm
System Zoom: Fixed Automated Fixed
Z Stage: Automated Motorized
X/Y Stage: Manual or Automated (optional) Automated N/A
Field of View: ≤ 9 mm ≤ 16 mm ≤ 12 mm
Software: Mx
Notes:  STR (Surface Topography Repeatability) is a quantification of instrument capability, per ISO 25178-604.  STR can be improved by filtering and/or measurement averaging.
* CSI = Coherence Scanning Interferometry
   PSI = Phase Shifting Interferometry

Specialty Models

Micro lenses and molds, spherical and aspherical
Compass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO's Compass™ system provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points.

Packaging Metrology System for Panel-Based PCB's
APM650™ – The APM650™ packaging metrology system provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.

Profiler Objectives

Objectives for Zygo Optical Profilers
Optical profiler objectives, mounted on a turret
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives Zygo offers for its optical profilers is unmatched in the industry, and is continually growing. All Zygo objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to Zygo.

Zygo also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.

Inquiry Form
Please use the form below to contact us with any questions you have regarding Zygo's Optical Profiler systems, or surface profiling in general.

First Name * Last Name *
Phone Number E-mail Address *
Company or Organization * Job Title or Function*
Street Address City
State/Province * Zip/Postal Code
Country *
If you experience any difficulty submitting this form, please contact:
Please type your inquiry below:
* Required entries  

Note: If you experience any difficulty submitting this form, please contact: webmaster@zygo.com Optical Surface Profilers ZeGage™ ZeGage™ Plus NewView™ 8000 Nexview™ Nomad™ Compass™  New! APM650™ Mx™ Software Profiler Objectives

Optical Profiler Basics Surface Roughness Measurement Surface Profiling 3D Optical Microscopy 3D Interference Microscopy Brochures

Spec Sheets Technical Papers

Contact ZYGO today to learn more about Optical Surface Profilers!