Optical Surface Profiler
|Core Technology:||CSI*||CSI & PSI*||CSI*|
|STR:||3.5 nm||0.15 nm||0.12 nm||0.08 nm||0.12 nm|
|Vert. Scan Speed:||≤ 35 μm/s||≤ 73 μm/s||≤ 96 μm/s||≤ 15 μm/s|
|Max. Step Height:||≤ 20 mm||≤ 95 µm|
|X/Y Stage:||Manual or Automated (optional)||Automated||N/A|
|Field of View:||≤ 9 mm||≤ 16 mm||≤ 12 mm|
|Notes:||STR (Surface Topography Repeatability) is a quantification of instrument capability, per ISO 25178-604. STR can be improved by filtering and/or measurement averaging.
* CSI = Coherence Scanning Interferometry
PSI = Phase Shifting Interferometry
Zygo also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.
NewView™ MPT™ - ZYGO's NewView™ MPT makes it easy to measure precision parts right on the factory floor with a rugged enclosure that provides a secure, yet service-accessible, housing for the NewView™ 7000 Series surface profiling system.
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