Nexview™ LS650

Large Format Inspection & Metrology

Nexview LS650The Nexview™ LS650 metrology system is an inspection tool for automated measurement of injection molding tooling, PCBs, glass panels and other samples requiring an extended work volume up to 650 x 650 mm. It provides 2D & 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision.

Powerful Performance

Coherence Scanning Interferometry (CSI) is the measurement technology at the core of the Nexview™ LS650 system.

This non-contact technique provides high-precision, and high-value surface metrology benefits including:

  • Measures virtually all types of surfaces, from rough to super smooth, including thin films, steep slopes, and large steps.
  • Sub-nanometer measurement precision is independent of field magnification
  • Gage capable performance - exceptional precision and repeatability for the most demanding production applications.
  • SureScan™ vibration tolerance technology - robust operation in virtually any environment.
  • Mx™ software enables seamless data exchange with other ZYGO Profilers including ZeGage™ Pro, NewView™ 9000, and Nexview™ NX2.
  • MORE INFO
  • BROCHURES &
    SPEC SHEETS
  • APPLICATION
    NOTES
  • MANUALS
  • TECH PAPERS
  • VIDEOS

Maximize ROI

Nexview LS650

The Nexview™ LS650 has been designed and built to ensure that the system provides value for years to come.  With a metrology area that accommodates lateral dimensions up to 650 x 650 mm and sample load of > 100 kg, a vertical range of 150 mm, and options for a fully enclosed, or partially enclosed system, the Nexview™ LS650 provides maximum flexibility for large samples that require precision 3D optical profiling.

For example. The system accommodates:

  • Any of today's standard PCB substrate panel sizes
  • Custom defined sample holders for flexible sheets, etc. which can be deployed with little concern for their mass on the high load Y stage
  • Large, high mass injection molding plates that benefit from precise non-contact inspection to minimize potential precision surface damage

Customized chucks and sample holders can be designed or customer supplied to adapt the system for smaller panels or even singulated substrates to maximize application flexibility.

And the system's integrated recipe-driven automation software enables hands-free metrology of multiple features on each panel, all in a single workstation, reducing production time and increasing process knowledge. 

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Title3D Optical Profiler Accessory Guide
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TitleNexview™ LS650
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TitleNexview LS650
Title
Document
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3D Optical Profiler Accessory Guide
DocumentBrochure
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Nexview™ LS650
DocumentSpecifications
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Nexview LS650
DocumentSpecifications
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TitleForm and Roughness
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TitleMx™ Software Films Analysis
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TitleMeasuring Sub-Angstrom Surface Texture
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TitleMeasuring Dynamic MEMS Devices
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TitleIdentifying and Controlling Vibration
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TitlePSD Analysis
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TitleVision Software Suite
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TitleABS Geometry and MetroPro® Calculations
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TitleGetting the Most from the Advanced Texture Application
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TitleFiltering on the NewView™
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TitleHaze Controls Thin Film PV Performance
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TitlePhotovoltaic Panel Measurement on a NewView™
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TitleMeasuring with an Optical Diverter on a NewView
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TitleMeasuring Honed Surfaces with a NewView
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TitleDiesel Fuel Injector Metrology
Title
Document
Download Link
Form and Roughness
DocumentAB-0100
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Mx™ Software Films Analysis
DocumentAN-0001
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Measuring Sub-Angstrom Surface Texture
DocumentAN-0002
Download Link Download
Measuring Dynamic MEMS Devices
DocumentAN-0003
Download Link Download
Identifying and Controlling Vibration
DocumentAN-0006
Download Link Download
PSD Analysis
DocumentAN-0009
Download Link Download
Vision Software Suite
DocumentAN-0011
Download Link Download
ABS Geometry and MetroPro® Calculations
DocumentAN-0012
Download Link Download
Getting the Most from the Advanced Texture Application
DocumentAN-0013
Download Link Download
Filtering on the NewView™
DocumentAN-0014
Download Link Download
Haze Controls Thin Film PV Performance
DocumentAN-0041
Download Link Download
Photovoltaic Panel Measurement on a NewView™
DocumentAN-0044
Download Link Download
Measuring with an Optical Diverter on a NewView
DocumentAN-0052
Download Link Download
Measuring Honed Surfaces with a NewView
DocumentAN-0053
Download Link Download
Diesel Fuel Injector Metrology
DocumentAN-0100
Download Link Download
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TitleOptical Profiler Accessory Guide (for NewView 8/9000, & Nexview/NX2)
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TitleMx™ Quick-Start Guide
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TitleMx™ Reference Guide
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TitleMx™ Remote Access Guide
Title
Document
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Optical Profiler Accessory Guide (for NewView 8/9000, & Nexview/NX2)
DocumentOMP-0594J
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Mx™ Quick-Start Guide
DocumentOMP-0570D
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Mx™ Reference Guide
DocumentOMP-0550M
Download Link Download
Mx™ Remote Access Guide
DocumentOMP-0600A
Download Link Download
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Title3D Optical Profilers Are Enabling Reliable Engine Lightweighting
img1
TitleA new class of wide-field objectives for 3D interference microscopy
img1
TitleAccurate, repetitive, linear motion from biased piezoelectric actuators
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TitleAdvanced Metrology for Energy Efficiency
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TitleAdvances in optical metrology
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TitleAngle-resolved three-dimensional analysis of surface films by coherence scanning interferometry
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TitleApplications of model-based transparent surface films analysis using coherence scanning interferometry
img1
TitleCalibration of the amplification coefficient in interference microscopy by means of a wavelength standard
Title
Document
Download Link
3D Optical Profilers Are Enabling Reliable Engine Lightweighting
DocumentArticle
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A new class of wide-field objectives for 3D interference microscopy
DocumentTechnical Paper
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Accurate, repetitive, linear motion from biased piezoelectric actuators
DocumentTechnical Paper
Download Link Download
Advanced Metrology for Energy Efficiency
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download
Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry
DocumentTechnical Paper
Download Link Download
Applications of model-based transparent surface films analysis using coherence scanning interferometry
DocumentTechnical Paper
Download Link Download
Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard
DocumentTechnical Paper
Download Link Download
Challenges and solutions in the optical measurement of aspheres
DocumentTechnical Paper
Download Link Download
Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler
DocumentTechnical Paper
Download Link Download

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